Piezoelectrically driven microspray method and apparatus for atomizing administration
A piezoelectric drive and drug delivery technology, applied in the direction of nebulizer for treatment, can solve the problems of drug waste, atmospheric ozone layer destruction, unfavorable drug delivery, etc., and achieve the effect of reducing side effects and improving utilization rate
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[0014] According to the application requirements and relevant research results, the present invention is based on the basic principle of piezoelectric-driven inkjet printers, and utilizes MEMS (micro mechanical electronic system) technology to develop such figure 2 , 3 , 4 shows the piezo-driven atomization array micro-spray device for drug delivery. figure 2 In the shown device, the elastic cavity mold is composed of left and right elastic cavity molds, wherein 8 represents the silicon chip of the left elastic cavity, 9 represents the circular piezoelectric ceramic chip, 10 represents the silicon chip of the right elastic cavity, and 11 Represents the circular micro nozzle hole processed on the right elastic cavity mold silicon wafer 10, 12 is the elastic mold cavity formed by the left elastic cavity mold silicon wafer 8 and the right elastic cavity mold silicon wafer 10, 13 is the liquid supply pipe, and 14 is the electrode lead . Depending on whether the micro-spray adm...
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