Base board transporting device, base board processing system and base board transporting method

A substrate processing system and substrate handling technology, applied in thin material processing, transportation and packaging, optics, etc., can solve the problems of high device cost, inability to detect position offset, time waste, etc.
CN1405839AInactive Publication Date: 2003-03-26TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TOKYO ELECTRON LTD
Publication Date
2003-03-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

When a small pliers is pulled out to take substrate G from the cartridge C, the sensor 9 located at position P will draw a track T to move one side passing through one side(Ga) of substrate G. Thus, the position for having a perpendicular direction (Y direction) between the held substrate G and the moving forward / backward direction of small pliers 43 can be calculated from the timing of the subjected reflection light, which is obtained when the sensor 9 moves to pass through one side Ga, and the rotation pulse number of motor 6. Therefore, the shift can be detected by comparing with the timing when held at the normal position of small pliers 43.
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Description

technical field

[0001] The present invention relates to a substrate conveying device for conveying glass substrates used in liquid crystal displays (LCD) and the like, a substrate conveying method, and a substrate processing system such as a resist coating and developing processing system to which the substrate conveying device is applied. Background technique

[0002] In the manufacturing process of LCD, in order to form ITO (Indium Tin Oxide, Indium Tin Oxide) thin film and electrode patterns on the glass substrate for LCD to be processed, the same photolithography technology as that used in semiconductor device manufacturing is used. In photolithography, a photoresist is coated on a glass substrate, exposed, and then developed.

[0003] These existing series of processing procedures are carried out by an integrated coating and developing processing system. The coating and development processing system includes: a cassette stage on which a plurality of pallet cassettes co...

Claims

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