Exposure system as well as exposure method applied in color light filter
A technology of exposure system and light source, which is applied in the field of exposure system, can solve the problems of high cost of photomask, and achieve the effect of reducing production cost and size
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[0018] see image 3 , image 3 It is a schematic diagram of the exposure system of the preferred embodiment of the present invention. Such as image 3 As shown, the exposure system 30 includes a fixed light source 31, a photomask 32 fixed below the light source 31, an arc-shaped light-receiving area 33 formed on the photomask 32 and an optical system 34 located on the photomask 32, wherein the photomask 32 has several regularly arranged openings (slit) 32a, and the optical system 34 includes a trapezoidal mirror 34a, a concave mirror (concavemirror) 34b and a convex mirror (convex mirror) ) 34c is located between the trapezoidal mirror 34a and the concave mirror 34b. The exposure system 30 also includes a stage 35 and a substrate 36 on the stage 35 , and the stage 35 is used to carry and move the substrate 36 . A beam forming optical system (not shown) is also included between the light source 31 and the photomask 32, which is used to convert the light emitted by the light...
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