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Gas-phase deposition coating and vacuum heat-treatment on-line combined composite coating equipment

A technology of vapor deposition coating and vacuum heat treatment, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of pollution in the intermediate transmission link, and achieve improved cleanliness, channel rules, and long service life Effect

Inactive Publication Date: 2003-07-09
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The purpose of the present invention is to provide a composite coating equipment that can solve the problem of pollution in the intermediate transfer link and combine vapor deposition coating and vacuum heat treatment on-line

Method used

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  • Gas-phase deposition coating and vacuum heat-treatment on-line combined composite coating equipment
  • Gas-phase deposition coating and vacuum heat-treatment on-line combined composite coating equipment
  • Gas-phase deposition coating and vacuum heat-treatment on-line combined composite coating equipment

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Embodiment

[0021] The structure of the present invention is attached figure 1 , 2 As shown, it includes a coating chamber 1, a heat treatment chamber 2 and a glove box 3, and is characterized in that: it also includes a transfer chamber 4, which is a stainless steel cylindrical structure, and is arranged in the coating chamber 1, the heat treatment chamber 2 and the glove box. Between the boxes 3, it is connected with the coating chamber 1, the heat treatment chamber 2 and the glove box 3 through stainless steel pipes, and a stainless steel high vacuum plug valve 6 is arranged on the stainless steel pipes. The sheet or film is transferred between the three functional positions of the heat treatment sample stage, the coating substrate stage and the glove box; where:

[0022] Described transfer chamber 4 has loam cake, is provided with observation window 5 on it, and the pipe internal diameter size is suitable for sample to pass through; A support roller 9 is set to prevent the transfer ...

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Abstract

The present invention relates to a gas-phase deposition film-plating and vacuum heat treatment on-line combined composite deposition equipment, including deposition chamber, heat treatment chamber, glove box and transition chamber. The transition chamber is made into a stainless steel cylindrical structure, and is set between the deposition chamber, heat treatment chamber and glove box and is connected with the deposition chamber, heat treatment chamber and glove box by means of stainless steel pipeline, and on the stainless steel pipeline a stainless steel high vacuum insertion plate valve is set. Said transition chamber also is equipped with upper cover with observation window, and its side wall is equipped with a transfer bar and a robot, its heat treatment chamber also is equipped with an observation window.

Description

technical field [0001] The invention relates to a coating technology, in particular to a composite coating device which combines vapor deposition coating and vacuum heat treatment on-line. Background technique [0002] The application fields of thin film materials are constantly expanding, from reinforced films, decorative films to functional films, and the requirements for microstructure and composition control of films are getting higher and higher. For the control methods of film structure and composition distribution, there are substrate preheating temperature control, film forming speed control, ion beam assisted deposition, substrate bias control and so on. However, the heat treatment method has not been effectively applied to the membrane material. The reason is that in the prior art, the membrane equipment and the heat treatment equipment are two separate equipments. The material after coating will be taken out from the coating equipment and sent to the heat treatmen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/58
Inventor 赵越刘实王隆保
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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