Method of forming word wire of semiconductor

Abstract

A method for forming word line of semiconductor device wherein a lower portion of the word line on the channel region is a I-type and a upper portion of the word line is a line-type is disclosed. The method comprises (a) forming a sacrificial insulation film on a semiconductor substrate including an active region; (b) etching the sacrificial insulation film to form an I-type sacrificial insulation film pattern whereon a channel region is to be formed; (c) forming a source / drain region; (d) forming a first interlayer insulation film; (e) planarizing the first interlayer insulation film to expose the sacrificial insulation film pattern; (f) sequentially forming a insulation film and a second interlayer insulation film; (g) etching the second interlayer insulation film and insulation film using a word line mask; (h) removing the sacrificial insulation film pattern; (i) growing a gate oxide film; (j) forming a conductive layer; and (k) planarizing the conductive layer.

Description

technical field [0001] The present invention generally relates to a method of forming a word line of a semiconductor device, and more particularly, to a method of forming a word line of a semiconductor device, wherein the lower part of the word line on the channel region is I-type, and the upper part of the word line It is a linear type, which is beneficial to improve the characteristics, yield and reliability of the device. Background technique [0002] figure 1 is the layout diagram of conventional word lines, figure 2 is along figure 1 Sectional view of the I-I line. [0003] refer to figure 1 and 2 , the gate electrode 17 has a gate oxide film 15, which is disposed on the p-type semiconductor substrate 11, the substrate 11 has a device isolation film 13, the isolation film 13 defines the active region 12, and the source / drain region 19 is disposed on Both sides of the gate electrode 17 on the semiconductor substrate 11 . [0004] The active regions 12 are arrange...

AI Technical Summary

Problems solved by technology

Overlap produces gate-induced drain leakage ("GIDL") due to the voltage difference between the word line and the source / drain region, which causes the charge stored in the capacitor to be lost, degrading the device The refresh feature of

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