High-accuracy single F-P plate angular displacement measurement instrument
A displacement measurement, high-precision technology, applied in the field of high-precision single F-P plate angular displacement measuring instrument, can solve the problem of difficult high-precision angular displacement measurement, and achieve the effects of improving measurement accuracy, reducing measurement errors, and enhancing anti-interference ability.
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[0019] Please refer to FIG. 1, which is a schematic diagram of the structure of the high-precision single F-P plate angular displacement measuring instrument of the present invention. The high-precision single FP plate angular displacement measuring instrument of the present invention includes: a modulated light source 2 with a driving power source 1, a beam collimating objective lens 3 and a reflecting mirror 4 are arranged along the forward direction of the light beam emitted by the modulated light source 2 The object 5 to be measured is placed in the forward direction of the reflected light beam of the mirror 4. An F-P plate 6 and a beam splitter 7 are arranged in the forward direction of the reflected light of the object 5 to be measured. A lens 8 and a photoelectric conversion element 9 are arranged in the direction of the transmitted light beam at the port b of the beam splitter 7. The photoelectric conversion element 9 is connected to the analog-to-digital conversion elemen...
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