High-accuracy single F-P plate angular displacement measurement instrument
A displacement measurement, high-precision technology, applied in the field of high-precision single F-P plate angular displacement measuring instrument, can solve the problem of difficult high-precision angular displacement measurement, and achieve the effects of improving measurement accuracy, reducing measurement errors, and enhancing anti-interference ability.
Inactive Publication Date: 2004-07-28
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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The present invention relates to a high-accuracy single F-P plate angular displacement measuring instrument. It includes modudation light source with drive power supply, on the forward direction of light-beam sent out by modulation light source a high-beam collimating objective lens and a reflector, and on the forward direction of reflecting light-beam of reflector a body to be tested in set, and on the formward direction of the reflecting light of the body to be tested a F-P plate and a beam splitter is set, and a lens and a photoelectric converting element are set on the direction of the light-beam transmitted from port 6 of light splitter, the photoelectric converting element is connected with A/D conversion element connected with computer, and on the direction of light-beam reflected by port C of light splitter a CCD image detector is set, and said CCD image detector is connected with A/D conversion element connected with computer.
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Image detectorBeam direction +8
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Classification and recommendation of technical efficacy words
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