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High-accuracy single F-P plate angular displacement measurement instrument

A displacement measurement, high-precision technology, applied in the field of high-precision single F-P plate angular displacement measuring instrument, can solve the problem of difficult high-precision angular displacement measurement, and achieve the effects of improving measurement accuracy, reducing measurement errors, and enhancing anti-interference ability.

Inactive Publication Date: 2004-07-28
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, it is difficult to use F-P plate interference to achieve high-precision angular displacement measurement

Method used

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  • High-accuracy single F-P plate angular displacement measurement instrument
  • High-accuracy single F-P plate angular displacement measurement instrument
  • High-accuracy single F-P plate angular displacement measurement instrument

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Embodiment Construction

[0019] Please refer to Fig. 1, Fig. 1 is a structural diagram of a high-precision single F-P plate angular displacement measuring instrument of the present invention. The high-precision single F-P plate angular displacement measuring instrument of the present invention comprises: a modulated light source 2 with a drive power supply 1, a beam collimating objective lens 3 and a reflector 4 are arranged along the advancing direction of the light beam emitted by the modulated light source 2, An object 5 to be measured is placed in the advancing direction of the reflected light beam from the mirror 4 . An F-P plate 6 and a beam splitter 7 are placed in the advancing direction of the reflected light from the measured object 5 . A lens 8 and a photoelectric conversion element 9 are arranged in the direction of the transmitted light beam at port b of the beam splitter 7 , and the photoelectric conversion element 9 is connected to an analog-to-digital conversion element 10 connected to...

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Abstract

The present invention relates to a high-accuracy single F-P plate angular displacement measuring instrument. It includes modudation light source with drive power supply, on the forward direction of light-beam sent out by modulation light source a high-beam collimating objective lens and a reflector, and on the forward direction of reflecting light-beam of reflector a body to be tested in set, and on the formward direction of the reflecting light of the body to be tested a F-P plate and a beam splitter is set, and a lens and a photoelectric converting element are set on the direction of the light-beam transmitted from port 6 of light splitter, the photoelectric converting element is connected with A / D conversion element connected with computer, and on the direction of light-beam reflected by port C of light splitter a CCD image detector is set, and said CCD image detector is connected with A / D conversion element connected with computer.

Description

Technical field: [0001] The invention is a high-precision single F-P plate angular displacement measuring instrument. Especially related to single F-P plate sinusoidal phase modulation semiconductor laser interferometer. Background technique: [0002] Total internal reflection differential detection angular displacement measurement method is a high-precision angular displacement measurement method developed in recent years (see prior art [1] Weidong Zhou and Lilong Cai, "An angular displacement interferometer based on total internal reflection," Meas.Sci. Technol.9, 1647-1652 (1998)), the measurement principle of this method is as follows, the laser beam is incident from the glass medium plane into the air, when the incident angle is close to the critical angle of total reflection, the light of the reflected laser beam on the two medium interface The intensity will increase rapidly with the increase of the incident angle. According to the Fresnel formula, the linear relati...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01D5/12G02B27/28G06F3/00
Inventor 张彩妮王向朝
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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