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Drain water recovery system and method for producing device

A recovery method and technology of a recovery system, applied in cleaning methods and utensils, chemical instruments and methods, cleaning flexible objects, etc., can solve the problems that drainage cannot be recycled, the quality of recycled water cannot be effectively improved, and the use of recycled water is limited, and the use of recycled water can be achieved. The effect of improving recycling efficiency

Inactive Publication Date: 2004-09-29
POWERCHIP SEMICON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method of recycling process wastewater can increase the amount of recycled water, it cannot effectively improve the quality of recycled water, and will limit the use of recycled water
And when there is a problem with the drainage of a certain process, it may cause the situation that all the drainage cannot be recovered

Method used

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  • Drain water recovery system and method for producing device
  • Drain water recovery system and method for producing device
  • Drain water recovery system and method for producing device

Examples

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Embodiment Construction

[0017] figure 1 It is a schematic diagram illustrating a wastewater recovery system of a process device according to an embodiment of the present invention. This process wastewater recovery system includes a process device 100, a three-way valve 102, a conductivity analysis device 104, a controller 106, a recovery tank 108, a buffer tank 110, an intermediate tank 112, a raw water tank 114 and a raw water tank 116, a valve 118 and a valve 120 , a pump 122 and a pump 124, and a total organic carbon analysis device (Totalorganic carbon, TOC) 126. The name of the water tank here is named after the location where the water tank is placed, for example, the process water is discharged from the machine to the water tank inside the factory, and then recycled to the water tank of the factory equipment. The water tank located in the factory is generally called the buffer tank, while the water tank located at the factory equipment side is called the raw water tank.

[0018] The three-wa...

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PUM

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Abstract

The drained water recovering system and method is to measure the conductivity of the drained water with conductivity meter and drain water of different conductivity into different pipeline. The conductivity meter is matched with total organic carbon analyzer and intermediate tank liquid level controller for classified recovery of water. The recovered water of different characteristic is used in different purposes and this raises the reuse efficiency of drained water during production process.

Description

technical field [0001] The present invention relates to a drainage recovery system and method, and in particular to a process drainage recovery system and method. Background technique [0002] In the manufacturing process of integrated circuit components, the most frequent process step is wafer cleaning. The purpose of wafer cleaning is to remove organic compounds, metal impurities or particles attached to the wafer surface. However, wafer cleaning requires a large amount of water resources, which can easily lead to a large increase in production costs. Therefore, it is very important to recycle process equipment drainage for reuse in pure water, process cooling water, cooling water towers and other systems. Moreover, if the drainage of process equipment can be effectively controlled and recycled effectively, it can reduce water consumption, reduce production costs and enhance industrial competitiveness. [0003] However, if the reclaimed water only pays attention to the i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B11/00
Inventor 黄政忠宋坤森
Owner POWERCHIP SEMICON CORP