Rectangular vacuum gate valve

A vacuum insert, rectangular technology, applied in the direction of sliding valves, valve devices, engine components, etc., can solve the problems of unsuitable valves with circular ports, etc., and achieve the effect of high passing rate, simple structure and good sealing

Inactive Publication Date: 2004-11-17
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The general-purpose flapper valve now has a round valve opening, and the entire valve body is relatively large in size. In the semiconductor industry, such valves are used between vacuum and atmosphere. It is hoped that the diameter of the valve should be as large as possible. In addition, the parts that shuttle between the valves are generally flat silicon wafers, CD discs, hard disks, etc., so the circular port valve is not applicable here.

Method used

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Examples

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Embodiment Construction

[0010] According to the structural drawings 1 to 3, the handle (13) is installed on the valve shaft (1); Installed on the valve body shell (14) to ensure that the valve shaft (1) does not leak air when it moves up and down and rotates; the pressing piece (6) is fixed on the valve plate (7) by thin nails (9), and the fluororubber sealing ring (5) is fixed on the valve plate (7) by the pressing piece (6); the lower part of the valve shaft (1) passes through the valve body (17), and the set screw (16) fixes the valve body (17) on the valve shaft (1 ); while the screw (12), spring (10) and washer (11) connect the valve body (17) and the valve plate (7), when the valve shaft (1) is turned, due to the There is a semicircular eccentric groove (B) to make displacement and reset between the valve body (17) and the valve plate (7) under the joint action of the spring (10).

[0011] When closing the valve, press the handle (13) to drive the valve stem (1), valve body (17), valve plate (...

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Abstract

The invention is a kind of rectangle vacuum plugboard valve, which is used between the vacuum and the pipe of the atmosphere in the semiconductor industry, which is used to separate or open the electron element, it is made up of valve shell, valve shaft and the valve body. The character lies in: the valve shaft bottom has a valve body and a rectangle valve board, when the rotary handle drives the valve shaft to rotate, under the effect of the circle eccentric slot on the lower part of the valve shaft, the rectangle valve board are shifted leftward, seals the rectangle channel aperture needed to be closed, when rotates the handle reversely and pulls it upwards, the closed rectangle channel aperture can be opened. The invention is simple, the efficiency is high.

Description

Technical field: [0001] This invention relates to valves, and more particularly to valves used to switch off or switch on different vacuum chambers in vacuum systems in the semiconductor industry. Background technique: [0002] The general-purpose flapper valve now has a round valve opening, and the entire valve body is relatively large in size. In the semiconductor industry, such valves are used between vacuum and atmosphere. It is hoped that the diameter of the valve should be as large as possible. In addition, the parts that shuttle between the valves are generally flat silicon wafers, CD discs, hard disks, etc., so the circular valves are not suitable here. Invention content: [0003] The purpose of the present invention is to solve the above-mentioned problems in the prior art, and provide a rectangular vacuum gate valve. [0004] The technical solution of the present invention is composed of a valve body casing (14), a valve shaft (1) equipped with an operating hand...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/02
Inventor 初明璋韩立刘俊标安秉谦顾文琪
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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