Capacitor type semiconductor pressure sensor
A pressure sensor and semiconductor technology, which is applied in the direction of semiconductor devices, fluid pressure measurement using capacitance changes, electric solid devices, etc., can solve the problem of high cost, reduce processing costs, meet market price requirements, and save costs.
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[0012] Please refer to figure 2 , figure 2 It is a schematic cross-sectional view of the capacitive semiconductor pressure sensor 30 of the present invention. Such as figure 2 As shown, the pressure sensor 30 of the present invention mainly includes a non-single crystal silicon substrate 32; a conductive and movable polysilicon diaphragm 34; a polysilicon supporter 36, which is arranged on the non-single crystal silicon substrate 32 for fixing The two ends of the polysilicon diaphragm 34 form an airtight cavity 38 between the polysilicon diaphragm 34 and the non-single crystal silicon substrate 32; a fixed electrode 40 is arranged in the non-single crystal silicon substrate 32 below the polysilicon diaphragm 34. The polysilicon diaphragm 34 The fixed electrode 40 and the fixed electrode 40 are respectively used as the upper and lower electrodes of the plate capacitor of the pressure sensor 30; and a control circuit, such as a thin film transistor (TFT) control circuit 42, is provi...
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