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Multi-path reflection fluorescent probe

A multiple reflective and fluorescent technology, applied in the field of multiple reflective fluorescent probes, can solve problems such as usage restrictions, errors, and low resolution

Inactive Publication Date: 2005-06-01
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, since the automatic optical inspection machine based on the fluorescent signal is not sensitive to the oxidized metal area on the circuit board, it will not cause false calls (False Calls) due to metal oxidation points, but the reflective white light automatic The optical detection system cannot distinguish the metal oxide part, which leads to wrong judgment of circuit defects, and because the reflective white light automatic optical detection system has strong light intensity but low resolution, resulting in restrictions on its use. Laser induced fluorescence for detection
[0005] At present, the structure of optical detection instruments mostly uses fluorescent probes with single or multiple light sources, which are imaged on the image detector through the assembly of optical mirrors, such as Image 6 As shown, it is an optical detection instrument with a double light source 70, the excitation light is reflected by the mirror group 80 to reach the substrate 60, and finally transmitted to the image detector 90, but under the structure of this instrument, the light emitted by the light source Most of them diverge and are not sent to the image detector, resulting in insufficient light intensity

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0021] For the multiple reflection fluorescent probe in this example, see figure 1 , is to cooperate with the defect detection on the surface of a printed circuit board 110, using laser to excite the organic fluorescent material of the non-metal wire part, cooperate with the optical filter 130 to filter the excited laser, and then use the image detector 140 to retrieve the laser-induced fluorescence (Laser Induced Fluorescence, LIF) image. The multiple reflection fluorescence probe includes two off-axis parabolic mirrors 120 and 121 confocally arranged, and its shape is as follows: Figure 2(A) to 2(D) As shown, one of the off-axis parabolic mirrors 121 has a linear slit 122 inclined at 45 degrees; a linear laser light source 150 generates laser excitation light, and directly incident off-axis through the linear slit 122 at an angle of 45 degrees The position of the focus 123 of the parabolic mirrors 120 and 121; an image detector 140, to detect the fluorescence induced by t...

Embodiment 2

[0023] For the multiple reflection fluorescent probe in this example, see image 3 , is to cooperate with a defect detection on the surface of a printed circuit board 210, use laser to excite the organic fluorescence of the non-metal wire part, cooperate with the optical filter 230 to filter the laser, and then use the image detector 240 to retrieve the laser-induced fluorescence (Laser Induced Fluorescence, LIF) image. The reflective fluorescence probe includes two off-axis parabolic mirrors 220 and 221 confocally arranged, wherein one off-axis parabolic mirror 221 has a linear slit 222 parallel to the surface of the printed circuit board 210; a linear laser light source 250 generates laser light The excitation light passes through the linear slit 222, reaches the off-axis parabolic mirror 221, and then reflects to the focal point 223 of the off-axis parabolic mirror; Fluorescence; a filter 230, located between the printed circuit board 210 and the image detector 240, to fil...

Embodiment 3

[0025] For the multiple reflection fluorescent probe in this example, see Figure 4, which is matched with a biochip 310 implanted with nucleic acid probes of a plurality of fluorescent groups, which is excited by laser light and filtered by a dichroic mirror 330 , and then retrieved by an image detector 340 for its laser-induced fluorescence light image. The fluorescent probe includes two off-axis parabolic mirrors 320 and 321 confocally arranged; a linear laser light source 350 generates laser excitation light, which is reflected by a dichroic mirror 330 and reaches the focal point 323 of the off-axis parabolic mirror; an image Detector 340, to detect the position of the fluorescent substance; a dichroic mirror 330, located between the biochip 310 and the image detector 340, to filter the excitation light of the laser, so that the fluorescent light can penetrate and reach the image detector 340; a detection platform 370 that moves horizontally and vertically is used to plac...

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Abstract

The multiple fluorescence reflecting probe for the fluorescent material detection of sample surface includes one light source to generate exciting light, which irradiates the fluorescent material on the sample to produce fluorescence; two confocal off-axis paraboloidal mirrors to collect and reflect the exciting light and fluorescence incident to the sample; one image detector to detect the fluorescence the fluorescent material in the sample generates; one light filtering lens between the sample and the image detector to filter off the reflected exciting light; and one optical developing lens set located between the light filtering lens and the image detector to focus the fluorescence onto the image detector.

Description

technical field [0001] The invention relates to a multiple reflection fluorescent probe, in particular to a multiple reflection fluorescent probe suitable for printed circuit boards or biological chips. Background technique [0002] There are two types of automatic optical inspection of printed circuit board (PCB): 1. Use white light (White Light) 10 to irradiate printed circuit board 20, and then use light sensor detector 30 to retrieve the reflected light signal of its metal wire , and become a reflection image after image processing, such as Figure 5 shown. 2. Use laser to excite the organic fluorescent substrate of the non-metal wire part, and then use the photosensitive detector to retrieve the laser-induced fluorescence (Laser Induced Fluorescence, LIF) image. [0003] The biggest difference between the above-mentioned automatic optical inspection methods lies in its optical illumination system. The first method uses white light to irradiate the printed circuit board...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/64G01N21/88
CPCG01J3/4406G01J3/02G01J3/0208G01J3/0218G01J3/0227G01J3/0243G01J2003/1213G01N21/645G01N21/6456G01N2021/6463
Inventor 李耀昌林雁容刘定坤
Owner IND TECH RES INST
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