Multi-path reflection fluorescent probe

Abstract

The multiple fluorescence reflecting probe for the fluorescent material detection of sample surface includes one light source to generate exciting light, which irradiates the fluorescent material on the sample to produce fluorescence; two confocal off-axis paraboloidal mirrors to collect and reflect the exciting light and fluorescence incident to the sample; one image detector to detect the fluorescence the fluorescent material in the sample generates; one light filtering lens between the sample and the image detector to filter off the reflected exciting light; and one optical developing lens set located between the light filtering lens and the image detector to focus the fluorescence onto the image detector.

Description

technical field [0001] The invention relates to a multiple reflection fluorescence probe, in particular to a multiple reflection fluorescence probe suitable for a printed circuit board or a biological wafer. Background technique [0002] There are two types of automatic optical inspection of printed circuit board (PCB): 1. Use white light (White Light) 10 to irradiate printed circuit board 20, and then use light sensor detector 30 to retrieve the reflected light signal of its metal wire , and become a reflection image after image processing, such as Figure 5 shown. 2. Use laser to excite the organic fluorescent substrate of the non-metal wire part, and then use the photosensitive detector to retrieve the laser-induced fluorescence (Laser Induced Fluorescence, LIF) image. [0003] The biggest difference between the above-mentioned automatic optical inspection methods lies in their optical illumination system. The first method uses white light to irradiate the printed circui...

AI Technical Summary

Problems solved by technology

In addition, since the automatic optical inspection machine based on the fluorescent signal is not sensitive to the oxidized metal area on the circuit board, it will not cause false calls (False Calls) due to metal oxidation points, but the automatic optical inspection machine with reflective white light The detection system cannot distinguish the oxidized part of the metal, which leads to wrong judgment of circuit defects, and because the reflective white light automatic optical detection system has strong light intensity but low resolution, resulting in restrictions on its use. induced fluorescence for detection

[0005] At present, the structure of optical detection instruments mostly uses fluorescent probes with single or multiple light sources, which are imaged on the image detector through the assembly of optical mirrors, such as Image 6 As shown, it is an optical detection instrument with a double light source 70, the excitation light reaches the substrate 60 through the reflection of the mirror group 80, and finally transmits to the image detector 90, but under the structure of this instrument, the light emitted by the light source Most of them diverge and are not sent to the image detector, resulting in insufficient light intensity

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