Apparatus for treating waste water containing hydrogen peroxide

Abstract

The device for treating waste water containing hydrogen peroxide of the present invention circulates the waste water containing hydrogen peroxide in the reaction tower (2) in an upward flow manner. In addition, the catalyst arranged in the reaction tower (2) is divided into multiple layers along the vertical direction, for example, two upper and lower layers of the lower catalyst layer (8) and the upper catalyst layer (14). In addition, the reaction tower (2) is provided with an exhaust pipe (20), so that at least the oxygen produced by the lowermost catalyst layer is discharged to the reaction tower (2) without contacting the catalyst layer above the lowermost catalyst layer. outside. Accordingly, the contact efficiency between the catalyst and hydrogen peroxide can be improved, and the device can be miniaturized, space-saving, and equipment cost can be reduced.

Description

technical field [0001] The present invention relates to a treatment device for various waste water containing hydrogen peroxide, such as semiconductor manufacturing waste liquid and food container washing waste water. Background technique [0002] Since hydrogen peroxide has excellent cleaning and sterilizing effects, and decomposes into oxygen and water after the reaction, it is widely used as a cleaning agent and disinfectant in manufacturing processes as a non-polluting drug. For example, in semiconductor device manufacturing plants, hydrogen peroxide is used for wafer cleaning and the like in various processes. [0003] Hydrogen peroxide used for cleaning and disinfection is discharged as waste liquid (water containing hydrogen peroxide) after the manufacturing process. Since the waste liquid has the ability to disinfect and become the cause of COD, it is best not to discharge it directly into public waters. [0004] At present, treatment with reducing agents such as s...

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Problems solved by technology

[0006] Although the treatment of wastewater containing hydrogen peroxide using a reduction catalyst has the above-mentioned advantages, there is a problem that the treatment equipment may be larger in comparison with the treatment using a reducing agent or an enzyme.

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