Interference type silicon base chip optical gyroscope

A micro-optical and interferometric technology, used in Sagnac effect gyroscopes, steering sensing devices, etc., can solve the problem of high precision, achieve high precision, and improve accuracy and reliability.

Inactive Publication Date: 2005-08-03
ZHEJIANG UNIV
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  • Abstract
  • Description
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Problems solved by technology

Compared with MEMS gyroscopes, MOG is slightly larger in size, but its accuracy is 1 to 2 orders of magnitude higher.

Method used

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  • Interference type silicon base chip optical gyroscope
  • Interference type silicon base chip optical gyroscope
  • Interference type silicon base chip optical gyroscope

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Experimental program
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Embodiment Construction

[0020] The micro-optical gyroscope replaces the optical fiber with a silicon-based optical waveguide, and integrates other optical devices on the silicon chip. The structural composition adopted by the present invention is:

[0021] Such as figure 1 Shown, the interferometric micro-optical gyroscope (IMOG) structure. The interferometric silicon-based chip micro-optical gyro has a detector 2, a sampling circuit 10, a digital signal processing circuit 9, a modulation drive circuit 8, a Y waveguide modulator 4, a beam splitter 3, a detector 2, and a beam splitter 3 connected in sequence. Connected to the light source 1, the Y waveguide modulator 4 is connected to the spiral optical waveguide 5, and the spiral optical waveguide 5 has an upper spiral optical waveguide 6, a lower spiral optical waveguide 7, and a Si substrate 12 of the spiral optical waveguide. The upper helical optical waveguide 6 and the lower helical optical waveguide 7 are located on the same silicon substrate,...

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Abstract

The interferential silicon chip micro optical gyroscope has successively connected detector, sample circuit, DSP circuit, modulating driver circuit, Y-waveguide modulator, beam splitter, light source, and spiral light waveguide with upper layer spiral light waveguide, lower layer spiral light waveguide and Si substrate for spiral light waveguide. The present invention is superior to optical fiber gyroscope, which has great fiber length and great temperature and vibration influence, and has small size, high reliability and high precision. The present invention is also superior to micro mechanical gyroscope, and has light source, optical device and processing circuit integrated on one chip and thus high precision and high reliability.

Description

technical field [0001] The invention relates to an interference type silicon-based chip micro-optical gyroscope. technical background [0002] High precision, high reliability, and miniaturization have always been the goals pursued by inertial navigation gyroscopes. Optical gyroscopes using the Sagnac effect are in line with this goal compared with various first-generation mechanical gyroscopes. Therefore, the laser gyroscope (ROG) in the optical gyroscope has become the second generation gyroscope, which is an innovative product in the 1970s; the fiber optic gyroscope (FOG) is the third generation gyroscope, which is an innovative product in the 1990s. At present, FOG has entered the whole application; micro-optical gyroscope (MOG) can be said to be the fourth generation gyroscope, and it is a new product of the 21st century. Compared with the MEMS gyroscope, the MOG is slightly larger in size, but its accuracy is 1 to 2 orders of magnitude higher. Compared with the fibe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/58G01C19/64
Inventor 杨国光吴兴坤徐建锋白剑刘成侯西云梁宜勇
Owner ZHEJIANG UNIV
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