Rotation device for vacuum vertical planet clamp

A rotating device and planetary technology, which is applied in the field of vacuum coating door body vertical planetary fixture rotation device, can solve the problems of short life, low vacuum degree, pollution, etc., and achieve the effect of improving service life and vacuum degree

Inactive Publication Date: 2005-11-30
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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AI Technical Summary

Problems solved by technology

For planetary fixtures with heavy rotating loads, in the case of unbalanced rotation without vacuum grease lubrication, the bearing life is very short, and it is generally damaged within 50 hours
At the same time, the carbonized vacuum grease has caused a certain degree of pollution to the vacuum
Therefore, the traditional structure has the disadvantages of low vacuum, pollution and short life.

Method used

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  • Rotation device for vacuum vertical planet clamp
  • Rotation device for vacuum vertical planet clamp

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Embodiment Construction

[0009] like figure 1 , figure 2 As shown, the present invention is composed of a speed-regulating motor 2, a vacuum chamber 5, a magnetic fluid 6, a planetary fixture 7, an active fixed gear 8, and a driven pinion 9. The motor 2 is connected to the main shaft of the magnetic fluid 6, and drives the planetary fixture 7 connected to the sealed main shaft 10 to rotate. The driven pinion 9 on the planetary fixture 7 revolves around the driving gear 8 fixed on the support frame while maintaining rotation. Keep each part with good coaxiality to prevent the rotation from getting stuck. The rotation state of the planetary clamp 7 can be monitored through the photoelectric switch 3 and the chopper 1 installed on the sealing main shaft 10 .

[0010] Magnetic fluid 6 mainly includes: sealed main shaft 10, load-bearing and positioning bearing 11, magnetic fluid 12, magnetic fluid housing 13, water inlet joint 14, screw cap 15, water outlet joint 16, heat insulation sleeve 17, magnetic ...

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PUM

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Abstract

A vacuum vertical planetary holder rotating device, which can improve uniformity of thickness of vacuum coating, works by that directly by hydromagnetic transmission, generator drives planetary holder rotate along vertical plane. Designing Support and location bearing in the double-layer water-cooled container, it prevents vacuum grease in the bearing from volatilizing and charring because of excess temperature, avoids the pollution to vacuum coating, ensures the normal usage of bearing, and improves the vacuum degree and the operation stability. The invented can apply extensively in vacuum coating and the related industry, especially to vertical rotational structure.

Description

technical field [0001] The invention relates to a device for rotating a vertical planetary fixture of a vacuum coating door body, and is especially suitable for an ion beam sputtering deposition optical thin film system. Background technique [0002] At present, the self-rotating bell type or planetary fixture rotation system in the domestic vacuum coating equipment is installed horizontally on the top of the vacuum chamber, and the motor drives the fixture system in the vacuum chamber to rotate through the transmission shaft of the rubber ring V-type vacuum dynamic seal. However, for ion beam sputtering coating equipment, the planetary fixture rotation system can only be installed vertically on the door body of the vacuum chamber, which causes the unbalanced rotation of the planetary fixture, which requires the installation of load-bearing and positioning bearings in the vacuum chamber. Since the working temperature in the vacuum chamber is 80-100°C, the vacuum grease on th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22
Inventor 刘洪祥熊胜明张云洞
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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