Component for the detection of electromagnetic radiation, in particular infrared, optical block for infrared imaging integrating said component and fabrication procedure thereof

A technology of electromagnetic radiation and components, applied in the field of detection of electromagnetic radiation, can solve problems such as increasing the surface area of ​​packaged parts, reducing the mechanical capacity of vacuum suction, and affecting the sealing cycle

Inactive Publication Date: 2006-03-01
ULIS SAS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0033] - Finally, activation takes longer (6 to 18 hours), which affects the sealing cycle and reduces the ability of the vacuum pumping mechanism
[0034] In general, regardless of the envisaged method of getter activation, getters are often fitted inside the package near the actual detector, and this increases the surface area of ​​the encapsulated package, thereby making miniaturizing the detection components more problematic , such miniaturization is a constant goal in the field of

Method used

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  • Component for the detection of electromagnetic radiation, in particular infrared, optical block for infrared imaging integrating said component and fabrication procedure thereof
  • Component for the detection of electromagnetic radiation, in particular infrared, optical block for infrared imaging integrating said component and fabrication procedure thereof
  • Component for the detection of electromagnetic radiation, in particular infrared, optical block for infrared imaging integrating said component and fabrication procedure thereof

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Embodiment Construction

[0055] The invention is described in more detail with respect to an infrared detector operating at ambient temperature and thus using a bolometer or microbolometer. However, electromagnetic radiation detectors, especially cooled infrared detectors, may be used.

[0056] Figure 2a and Figure 2b Two different embodiments of the invention are shown, both operating on the same principle. Figure 2a Two separate cavities are defined in , which are:

[0057] · The main or principal cavity (5), which is delimited by the base (1), side walls (2) and lid (3) including a transparent window (4), and contains a bolometric detector (6), which The bolometric detector is associated with its interconnected circuit (7) and thermoelectric module (8), this assembly is bonded to the substrate (1),

[0058] A secondary cavity (20) comprising a bottom (16), possibly made of metal, ceramic or semiconducting material, on which the material for sucking residual gas, i.e. the getter (13) is mounted...

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Abstract

The component has an enclosure (5) whose one of the sides (3) has a window (4) transparent to electromagnetic radiation. A detector (6) is positioned inside the enclosure, opposite to the window. A getter (13) maintains the vacuum at an acceptable level within the enclosure. The getter is positioned within a secondary enclosure (20), arranged outside the enclosure (5) and freely communicating with the enclosure (5). Independent claims are also included for the following: (A) an optical set for infrared imagery; (B) a process for forming a seal for a packaging case of the electromagnetic radiation detecting component.

Description

technical field [0001] The present invention relates generally to components for detecting electromagnetic radiation, in particular infrared radiation, and more particularly to components intended for use as optical imaging, for example such components are mounted inside infrared cameras operating at ambient temperature. Background technique [0002] A more or less high vacuum is required inside such components to allow the correct functioning of the detectors used and thus to provide reliable data and to increase the accuracy of the measurements made or the images obtained. [0003] Often lower than 10 is required for this detector -2 millibar pressure to operate satisfactorily. They are thus enclosed in a hermetic enclosure, inside which the required vacuum has already been generated. However, it is well known that, after sealing the encapsulating package surrounding the detector, thereby producing an enclosure containing a vacuum or low pressure, gas molecules absorbed ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/00G01J5/00H01L31/09H01L31/0203G03B42/08G03B42/00
CPCG01J5/04G01J5/0225G01J5/045H01L2224/48091G01J5/02G01J5/0806G01J5/08H01L2924/00014
Inventor S·坦内斯
Owner ULIS SAS
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