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Test desk for high frequency characteristics of semiconductor laser chip with noncoplanar electrode

A high-frequency characteristic and semiconductor technology, which is applied in the field of test benches for semiconductor laser chips, can solve problems such as inability to remove, inaccurate measurement, inconvenience, etc., and achieve the effects of avoiding adverse effects, convenient measurement, and avoiding damage

Inactive Publication Date: 2006-04-19
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0004] But this method has the following two deficiencies: First, because the chip response measured from the coplanar electrode of the heat sink will include the response of the parasitic elements introduced by the heat sink and the gold wire, and the influence of these parasitic elements is obvious, so the measurement is not accurate enough
To obtain the real response of the chip, a series of calibrations are required to deduct the relevant influences on the measurement results, which complicates the measurement; secondly, the process of bonding the chip and gold wire increases the complexity of the measurement and damages the chip possibility, and once the chip is bonded to the heat sink, it cannot be removed, which has caused great inconvenience to the actual work

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  • Test desk for high frequency characteristics of semiconductor laser chip with noncoplanar electrode
  • Test desk for high frequency characteristics of semiconductor laser chip with noncoplanar electrode

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Embodiment Construction

[0019] See figure 1 and figure 2 , The present invention is a non-coplanar electrode semiconductor laser chip high-frequency characteristic test bench, including:

[0020] A conductor platform 1 with a stepped structure. The conductor platform 1 includes a horizontal lower step surface 2 and an inclined upper step surface 3; the material of the conductor platform 1 is metallic copper; the horizontal lower step surface 2 is plated with Metal indium layer; the inclined upper step surface 3 is an inclined surface along the longitudinal direction of the step, so that the drop between the lower step surface 2 and the lower step surface gradually changes with different positions; this drop range covers the thickness range of the semiconductor laser chip;

[0021] A drop ruler 4, which is made on the upper step surface 3; the drop range indicated by the drop ruler 4 covers the thickness range of the semiconductor laser chip.

[0022] The inclination of the inclined upper step surface 3 ...

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Abstract

Characters of the test desk are that the test desk includes a conductor desk with a structure of sidestep and a scale for measuring fall. The conductor desk includes horizontal lower sidestep face and oblique upper sidestep face. Through the test desk, coplanar microwave probe can be used to carry out direct and convenient measurement for laser chip with noncoplanar electrode as well as prevent adverse effect brought by using heat sink and gold wire.

Description

Technical field [0001] The invention belongs to the field of optoelectronic devices and is a test bench for semiconductor laser chips used to assist high-frequency microwave probes in measuring non-coplanar electrodes. Background technique [0002] High-speed light source is one of the most critical components in optical fiber communication system as a device for generating optical signals. High-speed semiconductor lasers are currently the most important light source in optical communication systems. The high-frequency performance of the semiconductor laser determines the transmission rate of the optical communication system to a certain extent, so the accurate measurement of the high-frequency characteristics of the semiconductor laser becomes very important. [0003] Most semiconductor laser chips have a rectangular parallelepiped structure, with metal electrodes plated on the upper and lower surfaces, corresponding to the P pole and N pole of the laser diode. However, the curr...

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Application Information

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IPC IPC(8): G01R1/02G01R31/26H01L21/66G01M11/00H04B10/08H04B10/073
Inventor 陈诚刘宇袁海庆
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI