Isolation spacer for thin isolation semiconductor
A technology of semiconductors and components, applied in the field of microelectronic components with thin insulating semiconductor structures
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[0033] The following discussion provides quite a few embodiments or examples to incorporate different features in different embodiments. Specific examples of components and arrangements are described below to simplify the disclosure. Therefore, mere few examples should not be considered limiting. Additionally, the same notation and text may be used in different instances throughout the disclosure. Reuse of symbols and text is for simplification and clarity only and does not dictate relationships between different embodiments and / or discussion outlines.
[0034] figure 1 is a simplified flowchart of the method 200 for forming a thin insulating semiconductor device. and Figure 2 to Figure 7a and 7b are schematic cross-sectional views of the process of forming the semiconductor device 100 .
[0035] Method 200 starts from step 210, first provides as figure 2 A semiconductor substrate 110 is shown, a dielectric layer 120 is formed on the substrate 110 , and a semiconductor...
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