System and method for controlling the isodiametric growth of crystal

A technology of equal diameter growth and control system, applied in crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problem that it is difficult to further improve the diameter control accuracy, the crystal diameter growth is limited, and it is difficult to achieve the production purpose of crystal equal diameter growth, etc. question

Inactive Publication Date: 2006-10-04
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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Problems solved by technology

Obviously, this application only takes the temperature of the melt as the control object, but does not organically combine the temperature control of the melt with the control of the ingot pulling speed, and at the same time, the dynamic performance of the PID treatment is poor, so the control of the crystal diameter growth in this application is relatively limited
[0007] Usually, those skilled in the art on

Method used

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  • System and method for controlling the isodiametric growth of crystal
  • System and method for controlling the isodiametric growth of crystal
  • System and method for controlling the isodiametric growth of crystal

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Embodiment Construction

[0046] see figure 1 , the control system of crystal equal-diameter growth in this embodiment has a crystal growth furnace, a crystal diameter detection circuit 1, a crystal pull-up speed measurement circuit 2, a crucible temperature detection circuit 3, a heating voltage and current detection circuit 4, and a crystal pull-up speed regulation circuit 5. Heating power adjustment circuit 6, controller 7, industrial computer 8 and display screen 9.

[0047] The crystal diameter detection signal output end of the crystal diameter detection circuit 1 is electrically connected to the crystal diameter detection signal input end of the controller 7, and the crystal pull-up speed measurement signal output end of the crystal pull-up speed measurement circuit 2 is connected to the crystal pull-up speed measurement signal of the controller 7. The input end is electrically connected, the output end of the crucible temperature detection signal of the crucible temperature detection circuit 3 ...

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Abstract

The related control system for crystal equal-diameter growth comprises: a crystal growing furnace, a crystal diameter detection part, a control part for crucible temperature, a control part for crystal tension speed to real-time gather crystal tension speed signal and feedback to regulate the speed by algorithm of Fuzzy control and PID control, and a common controller to receive all former signal. this invention improves control precision greatly as well as the one-draw yield.

Description

technical field [0001] The invention relates to a control system and method for equal diameter growth of crystal, in particular to a control system and method for equal diameter growth of single crystal silicon. Background technique [0002] Semiconductor materials are the basic materials of the semiconductor industry. Today, more than 95% of semiconductor devices are made of silicon materials, and more than 99% of integrated circuits are silicon integrated circuits. The raw material required for the production of integrated circuits is single crystal silicon. In recent years, the world has intensified the development of solar energy, an environmentally friendly energy source, and the solar power station that converts solar energy into civil electric energy is rapidly emerging as an industry. The demand has also doubled, but there are only a handful of domestic manufacturers capable of producing monocrystalline silicon, and the production capacity is insufficient, which is f...

Claims

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Application Information

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IPC IPC(8): C30B15/22
Inventor 荀建华
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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