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Method and apparatus for measuring laser wavelength by heterodyne interference method

A technology of heterodyne interference and laser wavelength, applied in the field of laser measurement, can solve problems such as demanding requirements, and achieve the effects of easy construction, compact system structure, and improved wavelength measurement accuracy

Inactive Publication Date: 2006-10-11
TSINGHUA UNIV
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Problems solved by technology

However, the establishment of these new systems often requires special parts and processes, and the requirements are very demanding.

Method used

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  • Method and apparatus for measuring laser wavelength by heterodyne interference method
  • Method and apparatus for measuring laser wavelength by heterodyne interference method
  • Method and apparatus for measuring laser wavelength by heterodyne interference method

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Embodiment Construction

[0023] The method and device of the present invention will be further described below in conjunction with the accompanying drawings.

[0024] The method provided by the present invention is: first adjust the measured single-frequency laser to a dual-frequency laser whose polarization directions are perpendicular to each other, the light intensity is equal, and the frequency difference is Δf through a frequency shifting device to obtain a heterodyne signal. The modulation method can be acousto-optic modulation , electro-optic modulation, magneto-optical modulation, grating modulation, wave plate modulation, piezoelectric ceramic modulation or Zeeman effect frequency division. Let the frequency-stabilized known wavelength be λ 0 The standard laser also forms a dual-frequency laser (for example, a magnetic field is added to the standard laser, and the Zeeman effect (Zeeman) is used to make the emitted laser a dual-frequency laser). Separate a part of the standard laser and the m...

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Abstract

The invention discloses a method for using heterodyne interference method to measure the laser wavelength, and relative device. Wherein, shifting the frequency of single-frequency laser to generate two-frequency laser and attain the heterodyne signal; using heterodyne interferometer to couple modulated two-frequency standard wavelength laser and the detected laser into one interference system; via the change of heterodyne interferometer arm, to compare the phase change of heterodyne signal of said two lasers, to attain the wavelength of detected laser. Compared to present single-frequency interference measure that can only measure the integral grade of interference stripe, the invention can measure and compare the phase change of laser heterodyne signal, to improve the wavelength measure accuracy, and since it uses heterodyne method, the detecting signal is alternative, which can be amplified with high signal / noise ratio, therefore, the small signal can be extracted from high-noise background.

Description

technical field [0001] The invention relates to a method and a device for measuring laser wavelength by using heterodyne interferometry, and belongs to the technical field of laser measurement. Background technique [0002] The laser wavelength measurement system can be used to measure the output wavelength value of tunable lasers, or to calibrate the wavelength value of unknown lasers. [0003] In optical measurement, laser interferometry has been widely used due to its advantages of non-contact, high speed and traceability. Because of the adjustable wavelength, the tunable wavelength laser can generate the required synthetic wavelength chain, so it is widely used in the absolute distance interferometry (length measurement without guide rail) system. However, since tunable wavelength lasers (such as tunable semiconductor lasers) cannot be locked to the natural reference, a laser wavelength measurement system must be used to measure the wavelength value of the tunable wavel...

Claims

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Application Information

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IPC IPC(8): G01J9/02
Inventor 李岩王昕张书练
Owner TSINGHUA UNIV
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