Capacitance microwave power sensor

A microwave power and sensor technology, applied in the direction of instruments, measuring electricity, measuring electrical variables, etc., can solve the problems of microwave signal consumption, etc., and achieve the effects of improved compatibility and repeatability, good linearity, and high sensitivity

Inactive Publication Date: 2006-11-08
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, a

Method used

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  • Capacitance microwave power sensor

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Embodiment Construction

[0012] The capacitive microwave power sensor of the present invention takes GaAs or Si substrate 1 as substrate, is provided with coplanar waveguide 2 on GaAs or Si substrate 1, connects on coplanar waveguide ground wire 21 and is perpendicular to coplanar waveguide 2 A cantilever beam 3 is provided, the cantilever beam 3 is suspended above the coplanar waveguide 2, and a sensing electrode 4 is placed under the end of the cantilever beam 3. The height of the cantilever beam 3 is related to the sensitivity and reflection coefficient of the device, so the height of the cantilever beam 3 is selected to be 1-3 microns.

[0013] The manufacturing process of the capacitive microwave power sensor is fully compatible with the standard Si process or GaAs MMIC process.

[0014] The structure of the capacitive microwave power sensor is different from the previous online microwave power sensor based on MEMS technology. This structure uses the cantilever beam to induce the displacement of ...

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PUM

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Abstract

A condenser-like microwave power sensor utilizes the microwave power transmitted on a coplanar waveguide to attract the MEMS cantilever to result in the displacement of the cantilever and gets a microwave power structure transmitted on the coplanar waveguide by testing the change of capacitance between the catilever and the sensing electrode, in which, said sensor takes GaAs or a Si substrate as the substrate with a coplanar waveguide, a cantilever vertical to and floating above the waveguide is set on the earth wire of the waveguide and a sensing electrode is connected below the end of the catilever.

Description

technical field [0001] The present invention uses the microwave power transmitted on the coplanar waveguide to attract the MEMS cantilever beam to cause the displacement of the beam, and measures the microwave power transmitted on the coplanar waveguide by measuring the capacitance change between the cantilever beam and the sensing electrode. It belongs to the technical field of microelectronic devices. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement. In recent years, two types of online microwave power sensor structures based on MEMS ...

Claims

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Application Information

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IPC IPC(8): G01R29/08G01R31/00
Inventor 黄庆安韩磊廖小平
Owner SOUTHEAST UNIV
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