Resonant-type micro-mechanical optic fiber gyroscope

A mechanical gyro and resonance technology, which is applied in the direction of speed measurement, gyroscope/steering sensing equipment, and measuring devices, etc., can solve the problems of micro-mechanical gyro sensitivity and insufficient resolution, and achieve easy digital signal processing and improve sensitivity. , the effect of avoiding the influence of noise interference

Inactive Publication Date: 2006-11-22
BEIHANG UNIV
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  • Application Information

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Problems solved by technology

[0004] The problem solved by the technology of the present invention is: to overcome the deficiencies of the prior art, to provide a resonant micro-mechanical gyroscope, to solve the existing micro-mechanical gyroscope sensitivity, resolution is not high enough, and the problems existing in capacitance detection, and realize the frequency signal output , easy for digital signal processing

Method used

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  • Resonant-type micro-mechanical optic fiber gyroscope
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  • Resonant-type micro-mechanical optic fiber gyroscope

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Embodiment Construction

[0016] Such as figure 1 As shown, the present invention is composed of a comb-shaped interdigital driver 1, a flat mass 2, a lever amplification mechanism 3 and a double-ended tuning fork resonator 4. The flat mass 2 is in the middle position and is suspended on the base through a support beam. Its x direction Two comb-shaped interdigital actuators 1 fixed on the base are placed symmetrically on the upper side, and two pairs of lever amplification mechanisms 3 are arranged symmetrically in the y direction, and are connected to two double-ended tuning fork resonators (DETF) 4 on the outside.

[0017] Such as figure 2 As shown, the flat mass 2 is a thin solid cubic structure with a length and width of 100-1000 μm and a thickness of 70-80 μm, which is fixed on the xoy plane of the rotating coordinate system. After being driven by the electrostatic force, it will move along the x-axis direction at a speed υ relative to the rotating coordinate system, and the rotating coordinate ...

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Abstract

The disclosed resonance-form micro-mechanical gyro comprises: a comb-like crossed driver, a plate mass block, a lever-form amplifier, and a dual-end fork resonator. Wherein, forcing voltage on the driver, the mass block oscillates along x-axis and generates Coriolis force forced by external z-axis rotation; after amplifying by the lever, the Coriolis force acts on the resonator to regulate the motion periodically; it obtains the input angular frequency by measuring the difference output of the resonator. This invention improves sensitivity, resolution, and dynamic range, and convenient to digital process.

Description

technical field [0001] The invention relates to a resonant micro-mechanical gyroscope, which belongs to the field of micro-mechanical sensors in micro-electro-mechanical systems (MEMS), and is widely used as a micro-inertial device in the fields of automotive electronics, aerospace, weaponry and the like. Background technique [0002] The classic frame-type mechanical rotor gyroscope based on the principle of angular momentum is assembled from hundreds of (about 300) parts. It has a complex structure, large volume, and short service life, which cannot meet the requirements of technological development and many new applications. Therefore, solid-state gyroscopes without mechanical rotors have been developed one after another, such as laser gyroscopes, hemispherical resonant gyroscopes, and fiber optic gyroscopes. The performance of the first two gyroscopes can reach the drift accuracy of inertial navigation (0.01° / h); but the price is high and the volume is large, which is st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5733
Inventor 樊尚春王莹莹
Owner BEIHANG UNIV
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