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High reliability RF generator architecture

A power generator and radio frequency technology, applied in radio frequency amplifiers, amplifiers with semiconductor devices/discharge tubes, instruments, etc., can solve problems such as wrong components, time extension, and lower MTBF statistics

Inactive Publication Date: 2012-07-04
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This can lead to extended time spent resolving complex system-level issues
Due to the high complexity of wafer processing tools, it is possible to incorrectly identify components in normal operation, causing irregularities in the system
This can cause a functioning RF generator to be sent for repair when there are no issues, which further reduces the MTBF stat

Method used

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  • High reliability RF generator architecture
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Embodiment Construction

[0015] The following description is merely exemplary in nature and is not intended to limit the invention, application or application. It should be appreciated that corresponding reference numerals indicate like or corresponding parts and features throughout the drawings.

[0016] refer to figure 1 , one of several embodiments of the RF generator 10 is shown. The RF generator 10 includes at least two power amplifier (PA) modules or power amplifiers 12 - 1 , 12 - 2 , 12 - 3 and 12 - 4 , collectively referred to as power amplifiers 12 . Each of the power amplifiers 12 includes respective power transistors or driver modules 14 - 1 , 14 - 2 , 14 - 3 and 14 - 4 , which are collectively referred to as power transistors 14 . The output of the power amplifier 12 may communicate with respective inductive clamping circuits 16 - 1 , 16 - 2 , 16 - 3 and 16 - 4 , which are collectively referred to as inductive clamping circuits 16 . The rules for referring to like elements apply to the ...

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Abstract

A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.

Description

technical field [0001] The present invention relates to radio frequency (RF) power generators. Background technique [0002] The statements in this section merely provide background information related to the present disclosure and may not constitute prior art. [0003] RF generators are used in industrial applications such as manufacturing integrated circuits. In these applications, RF generators are critical components of the manufacturing process. The RF generator is also interfaced with many other devices such as sensors, matching networks, plasma chambers, etc. Likewise, removing and replacing failed generators is expensive, time consuming and / or technically complex. [0004] Leaving aside the external risks associated with a failed RF generator, today's RF generators have limited tolerance for failure or failure of internal components. For example, failure of a single component in a submodule of an RF generator can cause the RF generator to shut down. Downtime is ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04B1/02H04B1/04
CPCH03F3/211H03F1/52H03F1/0277H03F1/526H03F3/602H03F2200/451G01R31/00
Inventor 亚伦·T·瑞多姆斯基乔恩·士麦卡丹尼尔·J·林肯约根德拉·查拉大卫·J·库姆威帝姆·卢波莫斯基
Owner MKS INSTR INC