Glass-chip flowing minisize electrolyzer and manufacturing method
A mobile micro-electrolytic cell and micro-electrolytic cell technology, applied in cross fields, can solve the problems that the chip can only be used once, and the membrane electrode cannot be replaced, etc., and achieve the effect of close distance, flexible and convenient electrode configuration, and small voltage drop
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[0031] The specific manufacturing steps of preparing the micro electrolytic cell chip by photolithography and wet etching of the glass substrate based on the laser imagesetter printing mask are described in detail as follows.
[0032] 1. Use CoreDraw or similar software to design and generate mask graphics files for microchannels and electrode channels;
[0033] 2. Use the laser imagesetter to print the graphics file on the polyester film to form a black and white mask;
[0034] 3. Use an ultraviolet exposure machine to transfer the mask pattern to the positive glue (AZ4650) surface on the chrome plate glass (Changsha Shaoguang, SG2506):
[0035] 4. The exposed glass substrate is immersed in 0.5% NaOH solution and developed for 40-60 seconds to expose the pattern structure;
[0036] 5. Transfer the chip to an oven at 110°C and bake it for about 15 minutes to make the photo-adhesive film firm;
[0037] 6. Soak in the chromium removal solution for about 2 minutes under gentle shakin...
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