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Stamper, stamping method and production method of information recording medium

A technology for information recording and stamping, which is applied in the manufacture of optical record carriers, recording/reproducing by optical methods, optical record carriers, etc., and can solve problems such as difficulty in size and so on.

Inactive Publication Date: 2007-05-30
TDK CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, in the conventional imprint method, when the concave-convex pattern is formed on the base material 18z, it is difficult to form the length (opening length) of each concave portion 24z after the residue is removed (after the etching process) to a desired size. The problem

Method used

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  • Stamper, stamping method and production method of information recording medium
  • Stamper, stamping method and production method of information recording medium
  • Stamper, stamping method and production method of information recording medium

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Embodiment Construction

[0091] Hereinafter, the best mode of the stamper, the imprint method and the manufacturing method of the information recording medium of the present invention will be described with reference to the drawings.

[0092] First, the structure of an imprint apparatus 100 for manufacturing an information recording medium using the stamper of the present invention will be described with reference to the drawings.

[0093] The imprint apparatus 100 shown in FIG. 1 is equipped with a press machine 110 and a control unit 120, and when the information recording medium shown in FIGS. 2 and 3 can be manufactured according to the imprint method of the present invention, the stamper 20 (refer to FIG. On the intermediate body 10 (see FIG. 4 ), a structure of a concavo-convex pattern 36 (see FIG. 29 ) is formed. In this case, the information recording medium 1 is a magnetic recording medium of the disk read track type, and as shown in FIG. The servo pattern areas As are alternately arranged i...

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Abstract

There is provided a stamper on which stamper-side concave / convex patterns are formed and which is capable of manufacturing an information recording medium on which at least servo patterns are formed by concave / convex patterns. First convex parts that are continuously formed along a direction corresponding to a radial direction of the information recording medium are formed in the stamper-side concave / convex patterns. Each of the first convex parts is formed so that a height of a part of the first convex part from a reference plane, which is set between a front surface and a rear surface of the stamper, to protruding end of the first convex part increases as a length of the part of the first convex part in a direction corresponding to a circumferential direction of the information recording medium increases.

Description

technical field [0001] The present invention relates to a stamper used in the manufacture of information recording media, an imprinting method of pressing the stamper on a resin layer formed on the surface of a base material to copy its concave-convex shape, and manufacturing An information recording medium manufacturing method for an information recording medium. Background technique [0002] In the process of manufacturing an information recording medium, photolithography is conventionally known as a method of forming a fine uneven pattern (resist pattern) on a resist layer (resin layer) formed on the surface of a base material. In this photolithography method, a resist layer formed on a base material is irradiated with light to form an exposure pattern, and then the resist layer is developed to form a concave-convex pattern on the base material. In addition, in recent years, as a technique for forming finer patterns, electron beam lithography, which draws nanometer-sized...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29C33/42B29C59/02G11B7/26B29L17/00B81C99/00
CPCB29C2059/023G11B7/263B29L2017/005B29C59/022G11B5/855Y10S425/81
Inventor 服部一博岛川和也
Owner TDK CORP
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