Wire grid polarizer with double metal layers

Abstract

A wire grid polarizer with double metal layers for the visible spectrum. Parallel dielectric layers having a period (p) of 10˜250 nm and a trench between adjacent dielectric layers overlie a transparent substrate. A first metal layer having a first thickness (d1) of 30˜150 nm is disposed in the trench. A second metal layer having a second thickness (d2) of 30˜150 nm and a width (w) overlies on the top surface of each dielectric layer. The first and second metal layers are separated by a vertical distance (l) of 10˜100 nm. The first thickness (d1) is the same as the second thickness (d2). A ratio of the width (w) to the period (p) is 25˜75%.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a polarizer which provides a very high extinction ratio (>1000), and more particularly, to a wire grid polarizer with double metal layers for use in visible spectrum and a fabrication method thereof. [0003] 2. Description of the Related Art [0004] The use of an array of parallel conducting wires to polarize radio waves dates back more than 110 years. Wire grids, generally in the form of an array of thin parallel conductors supported by a transparent substrate, have also been used as polarizers for the electromagnetic spectrum. [0005]FIG. 1 illustrates a conventional wire grid polarizer. The wire grid polarizer 100 comprises a multiplicity of parallel conductive electrodes 110 supported by a dielectric substrate 120. This device is characterized by the grating spacing or pitch or period of the conductors 110, designated as P; the width of the individual conductors 110, designated a...

AI Technical Summary

Benefits of technology

[0016] The present invention improves on the conventional technology in that the wire grid polarizer with double metal layers has the period of 10˜250 nm, the first or second thickness of 30˜150 nm, and the vertical distance of 10˜100 nm. Additionally, the ratio of the width to the period is 25˜75%. Thus, the polarizer according to the present invention can reduce resonance to achieve the high extinction ratio (>1000) for the visible spectrum. Furthermore, the polarizer maintains a high extinction ratio for use at large incident angles. Thus, it is useful for LCD applications and ameliorates the disadvantages of the conventional technology.

Problems solved by technology

That is, the reference does not teach how to design the polarizer with high quality extinction for the visible spectrum.

Furthermore, the device only operates properly within narrow wavelength bands (about 25 nm) and the device is rather angularly sensitive.

These considerations make the device unsuitable for broad wavelength bands in the visible spectrum.

The device is difficult to manufacture, however, as it requires at least six intra-wire layers.

Nevertheless, the extinction ratio of this device is unstable.

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