Method of evaporating film used in an organic electro-luminescent display
a technology of electroluminescent display and thin film, which is applied in the direction of vacuum evaporation coating, electroluminescent light sources, coatings, etc., can solve the problems of poor uniformity of deposition thickness, decreased evaporation efficiency, and inconvenient patterning of conventional photolithography, so as to increase the use of evaporation source materials
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first embodiment
[0023]FIGS. 3A to 3C are schematic diagrams showing a method of evaporating thin film according to the first embodiment of the present invention. First, as shown in FIG. 3A, a first mask 32 with a rough pattern is placed below a metal plate 30, and a point evaporation source 34 is placed below the first mask 32. During the evaporation, the evaporating materials in the point evaporation source 34 can pass through a plurality of openings 33 patterned on the first mask 32, thus a plurality of first thin film 36 arranged in array are deposited on predetermined regions of the metal plate 30. As shown in FIG. 3B, the metal plate 30 with the first thin film 36 is employed as a plane evaporation source 38, and the first thin film 36 arranged in array are used as evaporating material cells 36. Preferably, the metal plate 30 is of high thermal-conductivity metallic material, such as Ta. The first mask 32 may be ceramic or metallic. In addition, during the evaporation, the metal plate 30 can b...
second embodiment
[0025] The second embodiment provides an evaporating method of improving the formation of the plane evaporation source to form a luminescent thin film used in the organic EL display. Generally, in evaporating luminescent thin film, evaporation materials comprise a host material and a dopant material. FIGS. 4A to 4C are schematic diagrams showing a method of evaporating thin film according to the second embodiment of the present invention. As shown in FIG. 4A, the first mask with a rough pattern is placed below the metal plate 30, and a host material evaporation source 35I and at least a dopant material evaporation source 35II are placed below the first mask 32. It is noticed that the host material evaporation source 35I and the dopant material evaporation source 35II must have the same evaporating temperature. In evaporating, the host material evaporation source 35I and the dopant material evaporation source 35II can pass through the openings 33 to deposit a plurality of first thin ...
third embodiment
[0026] The third embodiment provides a co-evaporating method to form a luminescent thin film used in the organic EL display, especially when the host material evaporation source and the dopant material evaporation source have different evaporating temperatures. FIGS. 5A to 5E are schematic diagrams showing a method of evaporating thin film according to the third embodiment of the present invention. First, as shown in FIG. 5A, a first mask 32I with a rough pattern is placed below the metal plate 30, and a host material evaporation source 35I is placed below the first mask 32I. During the evaporation, the host material evaporation source 35I can pass through the openings 33 of the first mask 32I to deposit a plurality of host material film 36I arranged in array on predetermined regions of the metal plate 30, as shown in FIG. 5B. At the same time, as shown in FIG. 5C, another first mask 32II with a rough pattern is placed below a metal net 31, and a dopant material evaporation source 3...
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Abstract
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