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Apparatus for manufacturing flat-panel display

a technology for flat-panel displays and apparatuses, applied in the direction of identification means, instruments, coatings, etc., can solve the problems of difficult opening of the top of the vacuum chamber, difficult vacuum chambers, and difficult machining processes, so as to facilitate the processing of large-size substrates, easy manufacturing, transportation, operation, and repair processes

Inactive Publication Date: 2005-08-25
ADVANCED DISPLAY PROCESS ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention provides a flat-panel display manufacturing apparatus that can easily process large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes. The apparatus includes a separable vacuum chamber with a top plate and bottom plate that form a closed space, and a cover member that covers the extension of the peripheral wall plate. The apparatus also includes a load lock chamber, a feeding chamber, and a processing chamber, which can manufacture flat-panel displays efficiently. The load lock chamber has an opening for inserting and ejecting substrates, and the feeding chamber has a feeding robot and a driver for lifting and positioning the substrate. The vacuum chamber has a chamber body with an engagement rim for easy assembly."

Problems solved by technology

For this reason, there is a problem in transporting such vacuum chambers from a manufacturing place thereof to an installation place thereof.
In addition, the machining process is also difficult.
Where the vacuum chamber is manufactured in the form of a single body, however, it is difficult to open the top of the vacuum chamber.
Furthermore, much labor is required.
For this reason, it is impossible to easily repair the vacuum chamber.
Due to an increase in chamber size, the footprint of the vacuum chamber in a clean room is also greatly increased.

Method used

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  • Apparatus for manufacturing flat-panel display
  • Apparatus for manufacturing flat-panel display
  • Apparatus for manufacturing flat-panel display

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0050]FIG. 3 is a front view illustrating a separable vacuum chamber included in an FPD manufacturing apparatus according to the present invention. FIGS. 4a and 4b are enlarged views corresponding to a portion “A” in FIG. 3, respectively. Although the illustrated vacuum chamber is applicable to any one of a load lock chamber, a feeding chamber, and a processing chamber, the following description will be given only in conjunction with the case in which the vacuum chamber is applied to a load lock chamber, for convenience of description.

[0051] As shown in FIG. 3, the separate vacuum chamber according to this embodiment, which is designated by reference numeral 100, includes a top plate 110 and a bottom plate 120, which face each other to define the top and bottom of the chamber 100, respectively, and a peripheral wall plate 130 coupled, at upper and lower ends thereof, to the top plate 110 and bottom plate 120, respectively. Extensions 135 are formed at the upper and lower ends of the...

second embodiment

[0066]FIG. 5 is a front view illustrating a structure of the stacked chamber included in the FPD manufacturing apparatus according to the present invention.

[0067] As shown in FIG. 5, the processing chamber 300 included in the FPD manufacturing apparatus includes at least two vertically-stacked sub chambers. In the illustrated case, the processing chamber 300 includes two vertically-stacked sub chambers 310 and 320. In order to manufacture FPDs, the FPD manufacturing apparatus generally includes a load lock chamber, a feeding chamber, and a processing chamber. Taking into consideration process and space efficiencies, the chambers of the FPD manufacturing apparatus may have a stacked structure. That is, one, two or all of the three chambers, which constitute the FPD manufacturing apparatus, may have a stacked structure.

[0068] Meanwhile, in the FPD manufacturing apparatus, the substrate processing time taken in the processing chamber is longest, as compared to the substrate processing...

third embodiment

[0171] In accordance with the third embodiment, the vacuum chamber is not manufactured in the form of a singe body, but manufactured in the form of a plurality of chamber sections, which will be assembled to form the vacuum chamber. Accordingly, there is an advantage in that it is possible to easily transport the vacuum chamber, manufactured to have a large size, to an installation place. That is, where such a large-size vacuum chamber is manufactured in the form of a single body, it is impossible to transport the vacuum chamber, using a vehicle. However, where the vacuum chamber is manufactured in the form of a plurality of chamber sections, it is possible to easily achieve transportation of the vacuum chamber by transporting the chamber sections, each of which has a reduced width, as compared to the vacuum chamber. Of course, the vacuum chamber is completely formed by assembling the chamber sections after the transportation thereof to an installation plate. Also, there is no probl...

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Abstract

An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for manufacturing a flat-panel display, and, more particularly, to a flat-panel display manufacturing apparatus which has an arrangement suitable to perform desired processes for large-size substrates. [0003] 2. Description of the Related Art [0004] Referring to FIG. 1, a general flat-panel display (FPD) manufacturing apparatus is illustrated, which is used to manufacture FPDs such as liquid crystal displays and plasma display panels (PDPs). As shown in FIG. 1, the FPD manufacturing apparatus, which is designated by reference numeral 1, includes a load lock chamber 100, a feeding chamber 200, and a processing chamber 300, which are connected in series. A gate valve G is arranged between adjacent ones of the chambers, in order to independently maintain a vacuum atmosphere in each chamber. [0005] The load lock chamber 100 is connected to an external station, in order to re...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): C23F1/00G09F9/00H01L21/00H01L51/56
CPCH01L21/67126H01L21/67196H01L51/56H01L21/67236H01L21/67201H10K71/00H10K71/861
Inventor LEE, YOUNG JONGCHOI, JUN YOUNGJO, SAENG HYUNYOON, BYUNG-OHKIM, GYEONG-HOONJEONG, HONG-GI
Owner ADVANCED DISPLAY PROCESS ENG