Device and method for manufacturing carbon nanotube
a technology of carbon nanotubes and nanotubes, which is applied in the direction of machines/engines, process and machine control, instruments, etc., can solve the problems of difficult to know the nature of the generated nanotubes and correct number of nanotubes, and develop a technique or device for forming nanotubes at desired locations
Inactive Publication Date: 2005-09-22
THE UNIV OF TOKYO
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Benefits of technology
The present invention provides a device and method for manufacturing carbon nanotube by flowing a reactant gas through a reaction region including a plurality of microstructures, each separated by an interval, and measuring changes in physical properties when a carbon nanotube bridge is formed between the microstructures. The device includes a detecting means for measuring changes in physical properties, such as a force sensor, electrical resistance meter, optical lever method measurement instrument, or Raman spectrometer. The method allows for easy formation of carbon nanotubes at desired locations with desired number and properties, and can be used in various sensors or devices using nanotubes. The method also allows for controlling the generation and growth of carbon nanotubes by stopping the generation and growth when the number of carbon nanotubes reaches a desired level. The invention provides a solution for manufacturing carbon nanotube with high accuracy and precision.
Problems solved by technology
However, in any of the techniques, it is very difficult to know the nature of the generated nanotubes and correct number of the nanotubes, so that until now there has not been developed a technique or device for forming nanotubes at desired locations with the desired number of nanotubes.
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[0051] Several preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[0052]FIG. 1 is a schematic diagram illustrating a basic configuration of an embodiment of the manufacturing device for manufacturing carbon nanotube. As shown in FIG. 1, a manufacturing device comprises: a vacuum chamber (quartz tube) 1 capable of being optically observed from without; a reaction region 3 (which will be explained in detail in FIGS. 2 and 3), at which disposed a pair of cantilevers which are facing each other, in the vacuum chamber 1; a spot lamp 5 for heating the reaction region to stimulate the growth of a carbon nanotube; a reactant gas feeding means 7, which is connected to one end of the vacuum chamber 1, for feeding reactant gas; a vacuum pump 9, which is connected to other end of the chamber, for vacuuming the chamber to recover the reactant gas; an objective lens 11 for observing the generation and growth of a carbon nanotube; an argon...
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Abstract
There is provided a device for manufacturing carbon nanotube. The devices has a chamber support part for supporting a chamber which contains a plurality of microstructures, each of which is separated from each other by an interval; a gas providing part, connected to the chamber, for flowing at least one reactant gas, including raw material gas for manufacturing carbon nanotubes, through the chamber; a measurement part for measuring a change in physical properties of at least one of the plurality of microstructures by using detecting part; and a control part for controlling the gas providing part based on the measured change in physical properties.
Description
BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a device and method for manufacturing carbon nanotube. [0003] 2. Related Art Statements [0004] Up to now there have been developed various techniques for forming carbon nanotubes. However, in any of the techniques, it is very difficult to know the nature of the generated nanotubes and correct number of the nanotubes, so that until now there has not been developed a technique or device for forming nanotubes at desired locations with the desired number of nanotubes. For example, as conventional technologies of the nanotube generation, there have been developed various methods and devices for forming carbon nanotubes at high temperature (equal to or more than 1000 degrees centigrade). Moreover, there is a technique for generating nanotubes at low temperature (about 600 degrees centigrade) by Shigeo Maruyama who is one of the inventors of the present invention, et al. (Refer to Japanese ...
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IPC IPC(8): C01B31/02D01F9/12D01F9/127
CPCD01F9/127B82Y30/00
Inventor SHIMOYAMA, ISAOMARUYAMA, SHIGEOMATSUMOTO, KIYOSHIHOSHINO, KAZUNORIMURAKAMI, YOICHI
Owner THE UNIV OF TOKYO