PDMS valve-less micro pump structure and method for producing the same

Abstract

A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.

Description

BACKGROUND OF THE INVENTION [0001] (1) Field of the Invention [0002] The invention relates to a valve-less micro pump structure and a method for producing the same, and more particularly to the structure that includes an elastomer main body made of polydimethylsiloxane (PDMS). [0003] (2) Description of the Prior Art [0004] In micro electric mechanical engineering, particularly that of biomedical field, micro fluid-detection and control components are crucial in utilization related to the precision automation industry. Among all the micro components, the micro pump as a fluid-control element is one of the key elements to make a micro fluid mechanism work. [0005] In the art, micro pumps with micro valve structures are usually made of a silicon-base material by a semiconductor manufacturing process. These micro pumps often have the following weakness. [0006] 1. The semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement. [0007] 2. Co...

AI Technical Summary

Benefits of technology

[0013] Accordingly, it is an object of the present invention to provide a PDMS valve-less micro pump structure and a method for producing the same, in which the PDMS material is widely used to have the production of the micro pumps to be simply structured, low cost, flexible, and more bio-compatible.

[0017] The PZT actuator is mounted on top of the membrane by a predetermined peripheral sealing way that can seal the main cavity by covering the center hole of the membrane.

Problems solved by technology

The semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement.

For the silicon-base material for producing the micro pumps is brittle, inherent problems in fatigue and pitting can never be neglected.

Also, it is well known that a brittle material is not suitable for application in the biomedical engineering.

The brittle silicon-base material for producing the micro pumps is vulnerable to impact and thus crack.

The silicon-base material for producing the micro pumps has poor bio-compatibility, and so limits the application of the micro electric mechanical components.

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