PDMS valve-less micro pump structure and method for producing the same

a valveless, micro-pumping technology, applied in the direction of flexible member pumps, machines/engines, positive displacement liquid engines, etc., can solve the problems of brittle silicon-base materials for producing micro-pumping, inherent fatigue and pitting problems that cannot be neglected, and the manufacturing process of microscopic pumps cannot meet the rapid production requirements. , to achieve the effect of simple structure, low cost and more bio-compatibl

a valveless, micro-pumping technology, applied in the direction of flexible member pumps, machines/engines, positive displacement liquid engines, etc., can solve the problems of brittle silicon-base materials for producing micro-pumping, inherent fatigue and pitting problems that cannot be neglected, and the manufacturing process of microscopic pumps cannot meet the rapid production requirements. , to achieve the effect of simple structure, low cost and more bio-compatibl

US20060083639A1Inactive Publication Date: 2006-04-20IND TECH RES INST
26 Cites 26 Cited by

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • PDMS valve-less micro pump structure and method for producing the same
  • PDMS valve-less micro pump structure and method for producing the same
  • PDMS valve-less micro pump structure and method for producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] The invention disclosed herein is directed to a PDMS valve-less micro pump structure and a method for producing the same. In the following description, numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are possible while still achieving the results of the present invention. In other instance, well-known components are not described in detail in order not to unnecessarily obscure the present invention.

[0048] Referring now to FIG. 1, a perspective exploded view of a preferred PDMS valve-less micro pump in accordance with the present invention is shown to mainly have a PDMS body 11, a membrane 12, and a PZT actuator 13.

[0049] The PDMS body 11 of the present invention is an elastomer that can be made of a PDMS material. The PDMS body 11 has a contour surface 110. As shown, the contour surface 110 is curved to form a main cavity 111, a le...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.

Description

BACKGROUND OF THE INVENTION [0001] (1) Field of the Invention [0002] The invention relates to a valve-less micro pump structure and a method for producing the same, and more particularly to the structure that includes an elastomer main body made of polydimethylsiloxane (PDMS). [0003] (2) Description of the Prior Art [0004] In micro electric mechanical engineering, particularly that of biomedical field, micro fluid-detection and control components are crucial in utilization related to the precision automation industry. Among all the micro components, the micro pump as a fluid-control element is one of the key elements to make a micro fluid mechanism work. [0005] In the art, micro pumps with micro valve structures are usually made of a silicon-base material by a semiconductor manufacturing process. These micro pumps often have the following weakness. [0006] 1. The semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement. [0007] 2. Co...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
20 Apr 2006
Publication
US20060083639A1
IPC
F04B17/00
CPC
F04B43/046
Inventors
LIU, MIN-SHENG; WANG, CHI-CHUAN