Vibrating micromechanical sensor of angular velocity

Abstract

The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Description

FIELD OF THE INVENTION[0001]The invention relates to measuring devices to be used for measuring angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. The object of the invention is to provide an improved sensor structure enabling reliable measuring with good performance, particularly in small size vibrating micromechanical solutions for sensors of angular velocity.BACKGROUND OF THE INVENTION[0002]In measuring angular velocity, the principle of the method of measuring based on a vibrating sensor of angular velocity has proved to be simple and reliable. In a vibrating sensor of angular velocity, a certain known primary motion is induced and maintained in the sensor. The desired motion to be measured by means of the sensor is then detected as a deviation of the primary motion.[0003]An external angular velocity in a direction perpendicular to the resonators' direction of motion acting on the sensor induces a Coriolis force in the seismic mass in...

AI Technical Summary

Benefits of technology

[0017]Preferably, the etching mask is designed such, that it compensates for non-idealities occurring over the surface of the disk, caused by the manufacturing process. Preferably the DRIE etching technique (DRIE, Deep Reactive Ion Etching) is used in the manufacturing. Preferably, in the manufac

Problems solved by technology

One of the most significant problems in micromechanical vibrating sensors of angular velocity is the so called quadrature signal, which is caused by poor dimensional precision in the structures.

In resonators manufactured using the means of micromechanics, there may be found tolerance errors in the perpendicularity of the directions of motion, which in the detection of the sensor of angular velocity cause a signal, called the quadrature signal, of a magnitude, at worst, hundreds of times larger than the angular v

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