Solar cell fabrication using implantation

a technology of solar cells and implantation, applied in the field of solar cells, can solve the problems of lack of utilization of blue light, excessive accumulation of unactivated dopants near the surface, and use of diffusion in forming dopants on the surface of semiconductor substrates, etc., and achieve the effect of low temperature annealing
US20090308439A1Inactive Publication Date: 2009-12-17INTEVAC
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
INTEVAC
Publication Date
2009-12-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

A solar cell device and method of making are provided. The device includes a silicon substrate including a preexisting dopant. A homogeneous lightly doped region is formed on a surface of the silicon substrate to form a junction between the preexisting dopant and the lightly doped region. A heavily doped region is selectively implanted on the surface of the silicon substrate. A seed layer is formed over the heavily doped region. A metal contact is formed over the seed layer. The device can include an anti-reflective coating. In one embodiment, the heavily doped region forms a parabolic shape. The heavily doped regions can each be a width on the silicon substrate a distance in the range 50 to 200 microns. Also, the heavily doped regions can be laterally spaced on the silicon substrate a distance in the range 1 to 3 mm from each other. The seed layer can be a silicide. The silicon substrate can include fiducial markers configured for aligning the placement of the heavily doped regions during an ion implantation process.
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Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to co-pending U.S. Provisional Application Ser. No. 61 / 131,687, filed Jun. 11, 2008, entitled “SOLAR CELL FABRICATION USING IMPLANTATION,” co-pending U.S. Provisional Application Ser. No. 61 / 131,688, filed Jun. 11, 2008, entitled “APPLICATIONS SPECIFIC IMPLANT SYSTEM FOR USE IN SOLAR CELL FABRICATIONS,” co-pending U.S. Provisional Application Ser. No. 61 / 131,698, filed Jun. 11, 2008, entitled “FORMATION OF SOLAR CELL-SELECTIVE EMITTER USING IMPLANTATION AND ANNEAL METHODS,” co-pending U.S. Provisional Application Ser. No. 61 / 133,028, filed Jun. 24, 2008, entitled “SOLAR CELL FABRICATION WITH FACETING AND IMPLANTATION,” and co-pending U.S. Provisional Application Ser. No. 61 / 210,545, filed Mar. 20, 2009, entitled “ADVANCED HIGH EFFICIENCY CRYSTALLINE SOLAR CELL FABRICATION METHOD,” which are all hereby incorporated by reference as if set forth herein.FIELD OF THE INVENTION

[0002] The present invention relates...

Claims

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