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Semiconductor integrated circuit device and method of manufacturing the same

a technology of integrated circuit and semiconductor, which is applied in the direction of semiconductor devices, diodes, capacitors, etc., can solve the problems of increasing process costs, shortening the life of tddb due to fluctuations in the thickness of the insulating film of the capacitor element described above, and increasing the cost of process, so as to achieve the effect of improving the life of the insulating film

Inactive Publication Date: 2010-08-26
RENESAS ELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a semiconductor integrated circuit device with a capacitor element and a fin-type field effect transistor (FET) on the same substrate. The device includes an upper surface insulating film that is thicker than a side surface insulating film, which reduces electric field concentration at the edge of the lower electrode and improves the life of the insulating film. The method of manufacturing the device allows for the simultaneous formation of the capacitor element and the FET, improving manufacturing efficiency.

Problems solved by technology

Therefore, introduction of a high-permittivity film (high-k film) in order to form a MIM capacitor element increases the process cost.
Therefore, when a capacitor element is formed utilizing a FinFET structure, there arises a problem that the time dependent dielectric breakdown (TDDB) life of the insulating film becomes shorter.
However, shortening of the TDDB life due to fluctuations in thickness of the insulating film of the capacitor element described above is not at all taken into consideration.
However, shortening of the TDDB life of the insulating film due to electric field concentration at the edge portion of the electrode is not at all taken into consideration.

Method used

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  • Semiconductor integrated circuit device and method of manufacturing the same
  • Semiconductor integrated circuit device and method of manufacturing the same
  • Semiconductor integrated circuit device and method of manufacturing the same

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first embodiment

[0073]A method of forming the respective components of the capacitor elements in this embodiment is the same as the method described in the In the following, a manufacturing method is described mainly with regard to a process in which the lower electrode 4 and the upper electrode 7 of the capacitor elements are made to be of the same conductivity type (n-type).

[0074]First, impurity implantation into the lower electrode 4 of the capacitor elements is carried out in the same process as the process of impurity implantation into the semiconductor layer of the p-type FinFET (corresponding to FIG. 4A). By doing so, the lower electrode 4 and the channel region of the p-type FinFET are lightly doped and are made to be of the n-type, and the impurity concentration of the lower electrode 4 is the same as the impurity concentration of the channel region of the p-type FinFET. Further, another impurity is implanted into the semiconductor layer of the n-type FinFET to determine the concentration...

second embodiment

[0078]In the above description of the second embodiment, a case in which the lower electrode 4 and the upper electrode 7 are of the n-type is described. However, it goes without saying that the lower electrode 4 and the upper electrode 7 may be of the p-type.

[0079]Next, a semiconductor integrated circuit device according to a third embodiment of the present invention is described. FIG. 7 is a plan view of the semiconductor integrated circuit device according to the third embodiment of the present invention. FIG. 8 is a schematic sectional view taken along the line VIII-VIII of FIG. 7. In FIG. 7, an upper electrode 27 is illustrated by dotted lines and an upper surface insulating film 26 is omitted. Further, in FIGS. 7 and 8, contacts are omitted. In this embodiment, the shape of the lower electrode in plan view is different from that in the first embodiment.

[0080]In this embodiment, a lower electrode 24 is formed so as to be in a lattice shape to increase the side surface area in or...

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Abstract

Provided is a semiconductor integrated circuit device including a capacitor element with an improved TDDB life. A semiconductor integrated circuit device (1) includes: a first electrode (4) including a first semiconductor layer which protrudes with respect to a plane of a substrate; a side surface insulating film (5) formed on at least a part of a side surface of the first electrode (4); an upper surface insulating film (6) formed on the first electrode (4) and the side surface insulating film (5); and a second electrode (7) which covers the side surface insulating film (5) and the upper surface insulating film (6). The first electrode (4), the side surface insulating film (5), and the second electrode (7) constitute a capacitor element. A thickness of the upper surface insulating film (6) between the first electrode (4) and the second electrode (7) is larger than a thickness of the side surface insulating film (5) between the first electrode (4) and the second electrode (7).

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a semiconductor integrated circuit device including a capacitor element, and a method of manufacturing the same.[0003]2. Description of the Related Art[0004]In a semiconductor integrated circuit device, a capacitor element is generally used for decoupling between a power supply and GND, determining a time constant of a circuit, or other such purpose. For example, Japanese Patent Translation Publication No. 2006-503440 discloses an integrated circuit arrangement including a capacitor. The integrated circuit arrangement described in Japanese Patent Translation Publication No. 2006-503440 includes an electrically insulating region and at least one series of regions that form a capacitor, and the capacitor includes an electrode region formed in the vicinity of the insulating region, a dielectric region, and an electrode region formed away from the insulating region in this order. The insulat...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L27/108H01L29/92H01L21/8242
CPCH01L21/84H01L27/0629H01L29/785H01L27/1203H01L28/90H01L27/0805
Inventor FURUTA, HIROSHISHIRAI, TAKAYUKINAGA, SHUNSAKU
Owner RENESAS ELECTRONICS CORP
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