Anodizing device, continuous anodizing device, and film forming method

Abstract

An anodizing device has: a power supply drum that supports, in close contact therewith, a web consisting of an anodizable metal and has a part configured with a conductive material, to which the web is closely attached; a counter electrode provided facing the power supply drum; an electrolysis tank filled with an electrolyte, into which part of the power supply drum and the counter electrode are immersed; a protection member formed of a non-conductive material that protects the lateral direction end portions of the web supported by the power supply drum in close contact therewith and a portion of the power supply drum, to which the web is not closely attached, from the electrolyte; and a driver adapted to make the web and the protection member travel concurrently in the electrolyte in synchronization with the circumferential speed of the power supply drum.

Description

BACKGROUND OF THE INVENTION[0001]The present invention relates to an anodizing device, a continuous anodizing device, and a film forming method suitable for producing substrates for semiconductor elements that are usefully utilized in semiconductor devices such as solar cells, thin-film transistor circuits, and displays (image display devices), and electrodes for electrolytic condensers.[0002]Thin-film solar cells using a substrate made of a metal have a possibility of being used for various purposes compared to those using a glass substrate, in view of the lightness and flexibility of the substrate. Moreover, since the substrate made of a metal can endure a high-temperature process, photoelectric conversion characteristics are improved, and accordingly, a highly efficient solar cell can be expected.[0003]In a solar cell module, solar cells are integrated by being connected to one another in series on the same substrate, thereby improving the module efficiency. At this time, an insu...

AI Technical Summary

Benefits of technology

The present invention provides an anodizing device and a continuous anodizing device with low contact resistance. A film forming method using such devices is also provided to further decrease contact resistance and reduce change in contact resistance. Additionally, the continuous anodizing device can produce a thick film quickly for thin webs made of aluminum or composite conductive metal foils.

Problems solved by technology

However, the device of JP 6-108289 A is complicated, and the electrolytic solution is diluted with water on the surface of close contact of the drum, so the concentration of the electrolytic solution needs to be continuously managed.

Moreover, there is a possibility that when the water that forms a thin layer on the surface of close contact generates gas by electrolysis, the thin layer may become a gas layer, the contact resistance may increase, and this may lead to sparking.

Therefore, the band easily strays from an end portion of the aluminum foil, and this makes it difficult to perform continuous operation.

Furthermore, there is a possibility that if tension is applied by crimping, the aluminum foil may be wrinkled when it is a thin foil, and the electrolytic solution may flow into the contact surface from the wrinkled portion.

As described above, even with any of the above methods, it is impossible to completely prevent the formation of anodic oxide film on the side of the surface of close contact.

Therefore, the problem with the fact that the contact resistance becomes unstable cannot be solved.

However, they have problems in that the heat generated along with anodization cannot be efficiently removed out of the system, a heat generation / temperature distribution arises in the system, the reaction becomes uneven in the anodized surface, and as a result, burning of the anodic oxide film, ununiformity of the thickness of the anodic oxide film, and the like arise.

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