Low-temperature gas supply device, heat transfer medium-cooling device, and low-temperature reaction control device
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first embodiment
[0058]A low-temperature gas supply device 100A, heat transfer medium-cooling device 200A, and low-temperature reaction control device 300A according to the first embodiment of the present invention will be explained. FIG. 1 is a schematic diagram according to the first embodiment, in which a low-temperature gas supply device, a heat transfer medium-cooling device, and low-temperature reaction control of the present invention are used.
[0059]As shown in FIG. 1, a low-temperature gas supply device 100A according to the first embodiment of the present invention includes a room temperature route 1A, from an one end of which a room temperature nitrogen gas (GN2)NNG is introduced as a gas of higher temperature than a low-temperature-liquefied gas described below, a low-temperature route 2A, from an one end of which a liquefied nitrogen (LN2)LN (for example, −196° C.) is introduced as the low-temperature-liquefied gas, a mixing route 3A, in which a mixed gas and a low-temperature nitrogen g...
second embodiment
[0073]Next, the second embodiment according to the present invention will be explained. FIG. 2 shows a schematic diagram according to the second embodiment including the low-temperature gas supply device, the heat transfer medium-cooling device, the low-temperature reaction control device of the present invention.
[0074]As shown in FIG. 2, a low-temperature gas supply device 100B according to the second embodiment of the present invention includes a room temperature route 1B, from an one end of which a room temperature nitrogen gas (GN2)NNG is introduced, a low-temperature route 2B, from an one end of which a liquefied nitrogen (LN2)LN (for example, −196° C.) is introduced, a mixing route 3B, in which a low-temperature nitrogen gas refrigerant described below flows, a first heat exchanger 5B, in which the room temperature nitrogen gas NNG introduced from the room temperature route 113 and the liquefied nitrogen LN introduced from the low-temperature route 2B are heat-exchanged with e...
third embodiment
[0088]Next, the third embodiment according to the present invention will be explained. FIG. 3 shows a schematic diagram according to the third embodiment including the low-temperature gas supply device, the heat transfer medium-cooling device, and the low-temperature reaction control device of the present invention.
[0089]As shown in FIG. 3, a low-temperature gas supply device 100C according to the third embodiment of the present invention includes a room temperature route 1C, from an one end of which a room temperature nitrogen gas (GN2)NNG is introduced as a gas of higher temperature than a low-temperature-liquefied gas described below, a low-temperature route 2C, from one end of which a liquefied nitrogen (LN2)LN (for example, −196° C.) is introduced as the low-temperature-liquefied gas, a mixing route 3C, in which a mixed gas and a low-temperature nitrogen gas refrigerant described below flows, an ejector (mixed device) 4C, in which the room temperature nitrogen gas NNG introduce...
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Abstract
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