Complex multivariate analysis system and method

Abstract

A complex multivariate analysis system is provided. The system has a storage module, a selecting module, an analyzing module, a correlation searching module and a reporting module. The storage module includes a first database and a second database. The first database records at least two data sets, each of the data sets including a plurality of items associated with a manufacturing process and data of the items. The second database records correlations of the items between the two data sets. The selecting module selects a first item from a first data set. The analyzing module analyzes the first item selected by the selecting module and determines whether the data of the first item conform to specifications or not. The correlation searching module searches the second database when the analyzing module determines that the data of the first item do not conform to the specifications, and selects a second item correlated to the first item from a second data set. Following that, the analyzing module analyzes the second item and determines whether the data of the second item conform to specifications or not.

Description

BACKGROUND OF INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a complex multivariate analysis system and a method for analyzing the same, and more particularly, to a complex multivariate analysis system for analyzing process parameters and testing results of products.[0003]2. Description of the Prior Art[0004]Many products are produced using a plurality of processes. For example, semiconductor devices are produced using repeatedly lithographic processes, etching processes and ion implantation processes. A great amount of equipment for these processes is therefore required for manufacturing the devices. In this case, manufacturers have to make a lot of efforts to maintain the equipment in normal to improve throughputs and qualities of the products.[0005]With progress of the semiconductor techniques, however, the processes and data for forming the products are more and more complicated. It is difficult to track and discover the process issues from the co...

AI Technical Summary

Benefits of technology

[0011]It is an advantage of the present invention that the complex multivariate analysis system and the method thereof store the two data sets associated with two different processes in the first database, and store the correlations of the items between the two data sets in the second database. The item to be analyzed can be effectively selected from the two databases to find out problems of the semiconductor processes according to the present invention. Therefore, wrong analysis made by engineers is prevented, production costs are reduced and the problems of the semiconductor processes are effectively resolved to improve the throughputs.

[0012]These and other objectives of the claimed invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings.

Problems solved by technology

A great amount of equipment for these processes is therefore required for manufacturing the devices.

With progress of the semiconductor techniques, however, the processes and data for forming the products are more and more complicated.

It is difficult to track and discover the process issues from the complicated data.

Being featured by critical processes, huge amounts of data, and complicated equipment modules, it is difficult for those skilled in the art to analyze and characterize the process parameters even using computers and data mining methods.

In the prior art methods, the analysis results are usually made according to personal experiences, thus reducing reliability thereof.

In addition, workers in the semiconductor manufacturers are often changed to make it difficult to find experienced engineers to deal with all of the manufacturing equipment.

When the testing results are irregular, the engineers are short of experiences to exactly point out problems resulting in the irregular testing results.

A lot of time must be spent for the engineers to find the problems.

As a result, efficiency of the manufacturing processes is reduced.

The production costs are increased, and the problems cannot be effectively resolved to improve the throughputs.

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