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Method of manufacturing liquid jet head

a manufacturing method and liquid jet technology, applied in the field of liquid jet head manufacturing, can solve the problems of difficult high-density arrangement, complicated manufacturing process, and difficult process, and achieve the effect of uniform thickness and good adhesion of the nozzle pla

Inactive Publication Date: 2008-06-03
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This method allows for the easy handling of passage-forming substrates, improving the formation of pressure generating chambers and enhancing manufacturing efficiency by maintaining substrate rigidity and preventing piezoelectric element deterioration, while enabling high-density piezoelectric element arrangement.

Problems solved by technology

However, a difficult process is required that the piezoelectric element is cut into a comb-teeth shape to make the piezoelectric element coincide with an array pitch of the nozzle orifices.
Thus, there has been a problem that a manufacturing process thereof is complicated.
Thus, there has been a problem that high-density arrangement is difficult.
However, since the passage-forming substrate is formed using a silicon wafer with a size of, for example, about 6 to 12 inches in diameter, reducing the thickness of the silicon wafer easily causes cracks or the like.
Therefore, there has been a problem that handling of the passage-forming substrate is difficult.
However, this manufacturing method using the sacrificial wafer has the following problems: the passage-forming substrate cannot be well positioned; positioning of the passage-forming substrate is time-consuming and, at the same time, a positioning process is required; and cracks occur in the periphery of the passage-forming substrate to which the sacrificial wafer is joined in the manufacturing process.
These problems can be seen not only in the case of the ink-jet recording head which ejects ink, but in a method of manufacturing another liquid jet head which ejects liquid other than ink, as a matter of course.

Method used

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  • Method of manufacturing liquid jet head
  • Method of manufacturing liquid jet head

Examples

Experimental program
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embodiment 1

[0057]FIG. 1 is an exploded perspective view schematically showing an ink-jet recording head according to Embodiment 1 of the present invention. FIG. 2A is a plan view of FIG. 1, and FIG. 2B is a sectional view taken along the line A-A′ of FIG. 2A. As illustrated, a passage-forming substrate 10 is made of a single crystal silicon substrate of plane orientation (110) in this embodiment, and a 1 to 2 μm-thick elastic film 50 made of silicon dioxide is formed beforehand on one surface of the passage-forming substrate 10 by thermal oxidation.

[0058]In the passage-forming substrate 10, pressure generating chambers 12, which are defined by a plurality of compartment walls 11, are arrayed in a width direction of the passage-forming substrate 10 by performing anisotropic etching of the single crystal silicon substrate from one surface side thereof. Further, a communicating portion 13 which communicates with a reservoir portion 32 of a reinforcing subtrate 30 to be described later is formed o...

embodiment 2

[0089]FIGS. 8A to 8C are sectional views of a pressure generating chamber in a longitudinal direction thereof, showing a method of manufacturing an ink-jet recording head according to Embodiment 2. The method of manufacturing the ink-jet recording head of this embodiment is the same as aforementioned Embodiment 1, except the step of forming a passage-forming substrate 10 to have a predetermined thickness. Therefore, description of the duplicated steps is omitted.

[0090]First of all, as shown in FIG. 8A, a reinforcing substrate 30 is joined onto a surface which is provided with piezoelectric elements 300, the surface being on the passage-forming substrate 10 on which the piezoelectric elements 300 are formed. Next, as shown in FIG. 8B, the passage-forming substrate 10, onto which the reinforcing subtrate 30 is joined, is ground or polished on the surface thereof opposite to the surface where the piezoelectric elements 300 are formed. Thus, the passage-forming substrate 10 is formed to...

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Abstract

Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a reinforcing substrate for reinforcing the rigidity of the passage-forming substrate, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the reinforcing substrate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers. Thus, handling of the passage-forming substrate becomes easy, and the pressure generating chambers can be formed with high precision.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application is a Continuation-in-Part of application Ser. No. 10 / 612,411, filed Jul. 3, 2003 now abandoned.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a method of manufacturing a liquid jet head which ejects jet liquid and, more particularly, to a method of manufacturing an ink-jet recording head which ejects ink droplets from nozzle orifices by pressurizing ink supplied within pressure generating chambers communicating with the nozzle orifices for ejecting ink droplets, through piezoelectric elements or heater elements.[0004]2. Description of the Related Art[0005]In an ink-jet recording head, part of each pressure generating chamber, which communicates with each nozzle orifice for ejecting ink droplets, is composed of a vibration plate, and this vibration plate is deformed by piezoelectric elements to pressurize ink within the pressure generating chambers, and thus ink droplets are...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01D15/00G11B5/127B41J2/045
CPCB41J2/14233B41J2/161B41J2/1623B41J2/1628B41J2/1632B41J2/1646B41J2/1629Y10T29/49401B41J2002/14241B41J2002/14419
Inventor SHIMADA, MASATOTAKAHASHI, TETSUSHI
Owner SEIKO EPSON CORP