The invention relates to the technical field of efficient
sulfur degradation and resource conversion and utilization of
sulfur hexafluoride, and discloses a device for preparing NF3 by activating SF6 through
dielectric barrier
discharge, the device comprises a reaction unit, a
gas supply unit is arranged on the left side of the reaction unit, a
power supply unit is arranged on the top of the reaction unit, and a condensation unit is arranged on the right side of the reaction unit. The
treatment unit is arranged at the bottom of the condensation unit, the reaction unit is connected with the
gas supply unit through a gas
pipe, the reaction unit is electrically connected with the
power supply unit, and the reaction unit is connected with the condensation unit through a gas
pipe; according to the method, a
dielectric barrier
discharge technology is adopted, efficient
discharge can be achieved under normal pressure or low pressure, a large number of high-energy electrons and
active particles are generated,
chemical reaction can be promoted, NH3 serves as a
nitrogen source,
fluorine-rich molecules SF6 serve as a
fluorine source, and NH3 reacts with low-
fluorine sulfide generated by
decomposition of SF6 through broken-bond
decomposition under the action of DBD
plasma, so that the
sulfur-rich sulfur-rich
nitrogen-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur-rich sulfur- and synthesizing a target product NF3.