Interference type silicon base chip optical gyroscope
A micro-optical and interferometric technology, which is used in Sagnac effect gyroscopes, optical waveguides, steering sensing devices, etc.
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[0020] The micro-optical gyroscope replaces the optical fiber with a silicon-based optical waveguide, and integrates other optical devices on the silicon chip. The structural composition adopted by the present invention is:
[0021] As shown in Figure 1, the interferometric micro-optical gyroscope (IMOG) structure. The interferometric silicon-based chip micro-optical gyroscope has a detector 2, a sampling circuit 10, a digital signal processing circuit 9, a modulation drive circuit 8, a Y waveguide modulator 4, a beam splitter 3 connected in sequence, the beam splitter 3 and the light source 1, The detector 2 is connected, and the Y-waveguide modulator 4 is connected with the spiral optical waveguide 5. The spiral optical waveguide 5 has a Si substrate 12 of the spiral optical waveguide, and the upper spiral optical waveguide 6 and the lower layer Spiral optical waveguide7. The upper helical optical waveguide 6 and the lower helical optical waveguide 7 are located on the same...
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