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Preionizing device for impusle gas laser

A pulsed gas and pre-ionization technology, applied in gas laser parts, laser parts, etc., can solve problems such as uneven pre-ionization, and achieve the effects of improving service life, increasing average output power, and increasing injection energy.

Inactive Publication Date: 2008-07-02
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

Richardson et al. (see "LargeapertureCO 2 laserdischarges"IEEEJ.Quantum.ElectronQE-8pp934-939, 1973) adopts two-dimensional planar multi-channel sliding flash discharge to provide pre-ionization for the discharge space, and the sliding flash surface is located under the mesh electrode, and the ultraviolet light passes through the mesh to ionize the main discharge For the gas molecules in the space, the energy consumed by pre-ionization is controlled by a public capacitor, which is easy to cause uneven pre-ionization

Method used

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  • Preionizing device for impusle gas laser

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[0019] A pre-ionization device for a pulsed gas laser is a surface multi-channel sliding flash pre-ionization device, which is characterized in that the device is placed on one side or both sides of the main discharge cathode. The device consists of multiple groups of pre-ionization electrodes arranged side by side. The main discharge cathode is a common electrode of the pre-ionization electrode group, and the other electrode of the pre-ionization electrode group is the same narrow metal sheet. The metal sheet should have strong anti-burning Corrosive, and easy to process, such as nickel sheet. In order to ensure the spatial uniformity of pre-ionization, the distance between adjacent narrow metal sheets is equal, generally 1-4 cm, and the specific number of metal sheets depends on the size of the laser. The electrode pair for pre-ionization consists of a piece of ablation-resistant, chemically stable insulating material (Al 2 o 3 , BaTiO 3 , SrTiO 3 etc.) dielectric plate ...

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Abstract

A preionizing device of pulse gas laser features that its surficial preionizing array is positioned at one or both sides of cathodes used also as a common electrode in electrode pairs of preionizing array, and the another electrode in electrode pair is composed of multiple narrow metallic pieces arranged uniformly on an insulating medium plate connected to cathode. When high-voltage pulses are applied to said electrode pair, flash discharge takes place to generate efficient ultraviolet light and provide a lot of initial electrons in discharge space.

Description

technical field [0001] The invention relates to gas lasers, in particular to a surface multi-channel sliding flash pre-ionization device for high repetition frequency pulsed gas lasers. technical background [0002] Performance of pulsed gas lasers (including maximum injection energy density, laser beam quality, etc.), especially TEACO 2 Lasers, excimer lasers, and pulsed HF / DF chemical lasers mainly depend on the degree of pre-ionization of the gas medium, that is, the distribution of electron concentration in the discharge space at the initial stage of discharge development. The two most common pre-ionization schemes It is free spark pre-ionization and corona pre-ionization. For high-pressure pulsed gas lasers, free spark pre-ionization is more effective than corona pre-ionization. The process of free spark pre-ionization is as follows: the energy storage capacitor is charged to a specific high voltage by a high-voltage power supply through a resistor. After the high-volt...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/03H01S3/02
Inventor 柯常军吴谨谭荣清万重怡刘世明张阔海
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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