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A sensor based on asymmetric interference arm Mach-Zehnder interferometer

An asymmetric and interference arm technology, applied in the field of sensors, can solve the problems of actual production inconvenience and achieve the effects of reduced production cost, high sensitivity and simplified process

Inactive Publication Date: 2008-11-12
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In actual production, it is usually necessary to etch a sample groove on one or both arms. From the perspective of production technology, an overlay process will be required, which will bring inconvenience to actual production.

Method used

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  • A sensor based on asymmetric interference arm Mach-Zehnder interferometer
  • A sensor based on asymmetric interference arm Mach-Zehnder interferometer
  • A sensor based on asymmetric interference arm Mach-Zehnder interferometer

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Embodiment Construction

[0021] Such as figure 1 As shown, the present invention sequentially includes an input waveguide 1, a 1×2 optical power splitter 2, two asymmetric Mach-Zehnder arms, a 2×1 multiplexer 9, and an output waveguide 10 connected together.

[0022] One of the two asymmetric Mach-Zehnder arms is formed by connecting the input tapered waveguide 3 of the sensing arm, the wide straight waveguide 4 with a width greater than the width of the input waveguide 1, and the output tapered wave 5 of the sensing arm, The other arm is formed by connecting a straight waveguide 6 with the same width as the input waveguide, an input tapered waveguide 7 of the reference arm, and an output tapered waveguide 8 of the reference arm.

[0023] The input tapered waveguide 3 of the sensing arm and the input tapered waveguide 7 of the reference arm have the same structure and length, and the output tapered waveguide 5 of the sensing arm and the input tapered waveguide 8 of the reference arm have the same stru...

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Abstract

The invention discloses a Mach-gender disturber type sensor based on asymmetry disturber arm. It comprises: an input waveguide, a 1X2 light-work splitter, two asymmetry Mach-gender arms, 2X1 wave condenser, and an output waveguide. The two arms of the Mach-gender disturber - referent arm and test arm are separately adopt the waveguide with two different widths; the waveguide adopts ridge-type light waveguide structure; the tested liquid is used as the cover layer of the waveguide; the phase change of the referent arm and the test arm which are caused by the change of the refractive index of the tested liquid are different, so that they can lead the intervention on the output end. It can test the responsible change of the refractive index by test the output engine.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a Mach-Zehnder interferometer sensor based on an asymmetric interference arm. Background technique [0002] With the development of modern measurement, control and automation technology, the role of sensors in various fields has become increasingly significant, and has become a key device that determines the quality of the system. The sensor is mainly a device that converts various non-electric quantities (including physical quantities, chemical quantities, biomass, etc.) into another physical quantity that is convenient for processing and transmission. Light waves have a strong ability to transmit information and process information, and various photoelectric detection devices (such as photodiodes, power meters, spectrometers, etc.) are widely used, so light waves are often used as information carriers and become transitional physical quantities. As an important branch of senso...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/45H01L49/00G01B9/02H10N99/00
Inventor 时尧成戴道锌何赛灵孙淼
Owner ZHEJIANG UNIV
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