Method for modulating carrying-performance nano-grade field effect transistor using dipale effect
A field-effect transistor, nano-scale technology, applied in semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve problems such as high requirements, difficult practical application, inability to completely overcome the shielding effect of metal electrodes, etc. performance, avoidance of shielding effects, easy-to-achieve effects
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Embodiment 1
[0030] Embodiment 1: comprise the following steps:
[0031] 1) Forming a dipole layer on the side surfaces of the source and drain of the nanoscale field effect transistor to change the electrostatic potential of the B region of the device body;
[0032] The specific embodiment of the formation of the dipole layer in the above steps can be formed by adsorbing atoms on the side surface of the electrode, or by adsorbing molecules on the side surface of the electrode, or by introducing a dipole plate on the side surface of the electrode to form a dipole Floor.
[0033] In this embodiment, atoms or molecules that easily lose electrons such as potassium atoms are adsorbed on the side surface of the electrode, and the negative charge 201 generated on the side surface of the electrode is close to the surface, and the positive charge is far away from the dipole layer of the surface, such as figure 2 (a) shown. If atoms or molecules that are easy to obtain electrons are adsorbed on ...
Embodiment 2
[0041] Embodiment 2: comprise the following steps:
[0042] 1) form a dipole layer 301 on the upper surface of the source and drain of the nanoscale field effect transistor, such as image 3 (a) shown. The specific method can adopt any one of the methods for forming the dipole layer in Embodiment 1.
[0043] The change curve 31 of the electrostatic potential of the device body caused by the dipole layer on the upper surface of the source and the drain is as follows image 3 (a), wherein the position flush with the contact surface of the device body and the electrode is set as zero. The dipole layer on the upper surface of the electrode mainly changes the electrostatic potential of the A region.
[0044] 2) Select the strength of the dipole layer on the upper surface of the electrode to adjust the position of the bottom of the conduction band (top of the valence band) in the region A of the device body relative to the Fermi energy pole of the electrode, so that it is benefic...
Embodiment 3
[0048] Embodiment 3: be that embodiment 1, 2 are used in combination, and form dipole layer simultaneously on the side surface and upper surface of the source electrode of nanoscale field effect transistor and drain electrode, specifically form the method for dipole layer, adjust this electrode surface For the size and strength of the dipole layer, as well as for adjusting the on and off of the gate voltage controller, the specific method steps in Embodiments 1 and 2 can be used.
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