Differential electric sensing type bidimensional displacement measuring sensor

Abstract

The invention discloses a kind of sensor used to measure two-dimension displacement. It is composed of a loop, a gag bit and an installing component. The magnetic circuit is close. The loop is in the installing component. The two-dimension displacement measuring sensor of differential motion inductance type is an area-changed inductance displacement sensor. There are four loops. The gag bit is moveable and on top of the four loops. In the x-axis direction and in the y-axis direction distributes symmetrically a group of loop. The structure and the electric performance parameter are completely uniform. The loops are in the differential motion form. The gag bit links the measured object directly or by the coupling bar. When the measured object moves, the gag bit carries out translation on the surface of the four loops to bring the inductance of the four loops to change. It can output directly the displacement of the measured object by the succeeding circuit. The structure of the sensor is novel. It is assembled and debugged simply and has high distinguishability, sensitivity and anti-jamming ability and wide linearity range.

Description

technical field [0001] The invention relates to a displacement sensor, in particular to a differential inductive displacement sensor capable of measuring two-dimensional displacement, specifically a differential inductive two-dimensional displacement measurement sensor. Background technique [0002] The measurement of two-dimensional geometric quantities is widely used in industrial production and scientific research, such as the positioning of two-dimensional worktables and the displacement display of two-dimensional measuring heads. For the measurement of two-dimensional displacement, the commonly used method is to place displacement sensors in the two directions of measurement. The disadvantage of this method is that two displacement sensors are required, which increases the measurement cost. On the other hand, when the measurement space is limited, It is difficult to install and debug the sensor, and it occupies a large space. In addition, this measurement method has man...

AI Technical Summary

Problems solved by technology

Due to the limitation of its own properties, the sensor using the optical principle has high requirements for dust prevention, and can only be used in a clean environment. It cannot be used for a long time in a non-purified environment, that is, it cannot be guaranteed in a general production workshop. long term work

[0003] Although the optical two-dimensional displacement sensor has high measurement accuracy, it is difficult to manufacture and assemble, and it also has certain requirements for the use environment

Sensors based on the principle of electromagnetic induction are easy to manufacture, can be used in harsher environments, and have high measurement accuracy. The current two-dimensional displacement sensors based on electromagnetic principles such as US6605939 and US6445311 are printed or sputtered coils on On the base layer, although the volume of the coil is reduced, the number of turns of the coil cannot be made much, and many performances of the sensor are limited, so it cannot be used for more precise measurement occasions

And the two-dimensional displacement sensor in CN2108273 is to measure the two-dimensional displacement of vertical line on the plane, is the inductive sensor based on variable gap principle, and its measurement range is less, and has nonlinearity

[0004] The project team of this invention has searched domestic and foreign patent documents and published journal papers, and has not found any reports or documents closely related to the present invention.

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