Plasma display screen medium protection film forming apparatus with angle control
A dielectric protective film and angle control technology, which is applied in ion implantation plating, tube/lamp screen manufacturing, coating, etc., can solve the problem that the performance uniformity of MgO dielectric protective film cannot be optimal, and the target angle cannot be effectively controlled and other issues to achieve the effect of improving process margin, increasing dynamic margin and reducing production cost
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[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0020] figure 1 A device for forming a MgO dielectric protective film with multiple evaporation sources in the prior art shown, the device includes a coating chamber 1, a substrate transport mechanism and a heater 6 are arranged above the coating chamber 1, and an opening plate is arranged at the opening of the coating chamber 1 8. There are four rotating annular hearths 3 (arranged in two rows and two columns) in the coating chamber 1, and four electron guns 2 are arranged on the wall of the coating chamber 1 corresponding to the hearth 3.
[0021] Place the substrate 4 to be coated on the bracket 5 and move it in the horizontal direction through the substrate transmission mechanism. During the movement of the substrate 4, the heater 6 arranged on the upper part of the substrate will heat it to prepare for the next step of coating. In the coating chamber 1,...
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