Unlock instant, AI-driven research and patent intelligence for your innovation.

Structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the same

A manufacturing method and structure technology, applied in optical recording/reproduction, optical recording carrier, optical recording carrier manufacturing, etc., can solve problems such as hindering miniaturization, achieve uniform formation, and suppress the effect of thermal expansion

Inactive Publication Date: 2009-07-08
SINGULUS TECHNOLGIES AG
View PDF21 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, when forming a structure with a high depth ratio, it is necessary to increase the thickness of the layer forming the structure, but if the film is thickened, heat will spread in the layer and hinder miniaturization

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the same
  • Structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the same
  • Structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0273] The medium for structure formation was produced as follows.

[0274] make Figure 1 ~ Figure 3 The media shown were used for construct formation. The film forming method is cathode sputtering method. The material, film thickness and main film-forming conditions of cathode sputtering method of each layer are shown in Table 1.

[0275] [Table 1]

[0276]

Embodiment 2

[0278] Used as a medium for structure formation figure 1 structure shown. The layer structure is glass substrate / Ge / SiON. The film-forming conditions of each layer are shown in Table 1. A structure was formed on this structure forming medium as follows.

[0279] The structure is formed according to the light irradiation process ( Figure 4 )→etching process ( Figure 5 ) in sequence.

[0280] Used in light irradiation process Figure 12 The laser irradiation setup shown. The laser irradiation device 61 includes a semiconductor laser. The wavelength of the laser is 405nm. Objective lens NA is 0.65. from the side of the substrate 103 figure 1 The shown medium for forming a structure is irradiated with laser light. Such as Figure 16 The laser light is pulse modulated by a laser modulator 62 as shown. Energy level P1 is 10mW and P2 is 3mW. The pulse width T is 24nsec. The pulse period S is 143nsec. The media is rotated by the media rotation device 64 . The rotati...

Embodiment 3

[0284] Used as a medium for structure formation figure 2 structure shown. The layer structure is polycarbonate resin substrate / ZnS-SiO 2 / AgInSbTe / ZnS-SiO 2 . The film-forming conditions of each layer are shown in Table 1. Constructs are formed on this medium. ZnS-SiO 2 The light absorption rate for laser wavelength 405nm is 6×10 -4 .

[0285] The structure is formed according to the light irradiation process ( Figure 9 )→etching process ( Figure 10 ) in sequence.

[0286] Used in light irradiation process Figure 12 The laser irradiation setup shown. The laser irradiation device 61 includes a semiconductor laser. The wavelength of the laser is 405nm. Objective lens NA is 0.85. From the uppermost layer of ZnS-SiO 2 sideways figure 2 The shown laser beam is irradiated on the surface of the dielectric film for structure formation. Such as Figure 16 The laser light is pulse modulated by a laser modulator 62 as shown. Energy level P1 is 4mW and P2 is 1mW. ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
wavelengthaaaaaaaaaa
wavelengthaaaaaaaaaa
wavelengthaaaaaaaaaa
Login to View More

Abstract

A structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the same. The producing method of the structure body comprises: a light irradiation step irradiating a medium for forming structure body having a stacked composition containing a light absorption layer which contains a light absorption material, and a thermal reaction layer which contains a thermal reaction material; an etch step etching the medium for forming structure which is irradiated with light. A fine structure body is uniformly produced on a large medium by constructing a medium for forming a structure body as a layered structure where a light absorbing layer for absorbing light to produce heat and a thermal reaction layer for reacting to heat are separated.

Description

technical field [0001] The present invention relates to a method for manufacturing a structure, a medium for forming a structure used in the method for manufacturing a structure, a structure obtained by the method for manufacturing a structure, and an optical recorder for recording and reproducing information through the structure (concave-convex pattern) Medium and method for reproducing the optical recording medium. Background technique [0002] In recent years, playback-only optical recording media (hereinafter also referred to as "ROM discs") composed of microstructures have spread widely, centered on DVD-ROMs. And the development of blue laser high-density ROM disk is also very fast. [0003] The ROM disc records information in a concavo-convex pattern, and is usually manufactured through a complicated process including an original disc production process, a master disc production process, and a replication process. [0004] The mastering process is performed in the o...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B23B7/02G11B7/26G11B7/007G11B7/004G11B7/005G11B7/24G11B7/24035G11B7/24056G11B7/24088G11B7/243G11B7/2433G11B7/2572
Inventor 三浦博
Owner SINGULUS TECHNOLGIES AG
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com