Epitaxy strontium lead titanate film with LiNiO2 cushioning layer

A technology of lead strontium titanate and lithium nickelate, applied in chemical instruments and methods, from condensed steam, single crystal growth, etc., can solve problems such as inability to use PST films, and achieve excellent epitaxial characteristics and high dielectric tunability. , the effect of good market prospects

Inactive Publication Date: 2009-08-12
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, only when depositing PST thin films on Si(001) substrates, the use of LaNiO3 layer achieves the purpose of both conductivity and epitaxial growth transfer function, but since LaNiO3 is (110) oriented on MgO(001) substrates, it cannot Used in the preparation of (001) oriented PST film

Method used

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  • Epitaxy strontium lead titanate film with LiNiO2 cushioning layer
  • Epitaxy strontium lead titanate film with LiNiO2 cushioning layer
  • Epitaxy strontium lead titanate film with LiNiO2 cushioning layer

Examples

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Effect test

Embodiment 1

[0031] Using lithium carbonate and nickel oxide as raw materials, mix 15% lithium carbonate and 85% nickel oxide according to the mass percentage, grind for 4 hours, press at a pressure of 5MPa, and sinter in air at a sintering temperature of 850 ℃, the heating rate is controlled at 300℃ / h, the holding time is controlled at 2h, and the lithium nickelate target is obtained after falling to normal temperature; lead carbonate, strontium carbonate and titanium oxide are used as raw materials, and the carbonic acid with a mass percentage of 25% Lead, 20% strontium carbonate and 55% titanium oxide are mixed, ground for 4 hours, pressed at a pressure of 6MPa, and sintered in air at a sintering temperature of 880°C, with a heating rate of 400°C / h and a holding time of After 2.5 hours, the lead strontium titanate target was obtained after cooling down to room temperature; using the prepared lithium nickelate target, the lithium nickelate film was deposited on the (001) MgO substrate by ...

Embodiment 2

[0033]Using lithium carbonate and nickel oxide as raw materials, mix 10% lithium carbonate and 90% nickel oxide according to the mass percentage, grind for 3 hours, press at a pressure of 2MPa, and sinter in air at a sintering temperature of 800 ℃, the heating rate is controlled at 100℃ / h, the holding time is controlled at 1h, and the lithium nickelate target is obtained after falling to normal temperature; lead carbonate, strontium carbonate and titanium oxide are used as raw materials, and the carbonic acid with a mass percentage of 30% Lead, 25% strontium carbonate and 45% titanium oxide are mixed, ground for 5 hours, pressed at 10 MPa, and sintered in air. After 3 hours, the lead strontium titanate target was obtained after cooling down to normal temperature; using the prepared lithium nickelate target, a lithium nickelate film was deposited on the (001) MgO substrate by using the pulsed laser deposition method, and the substrate temperature was 600°C; Using the prepared s...

Embodiment 3

[0035] Using lithium carbonate and nickel oxide as raw materials, mix 20% lithium carbonate and 80% nickel oxide according to the mass percentage, grind for 5 hours, press at a pressure of 10MPa, and sinter in air at a sintering temperature of 900 ℃, the heating rate is controlled at 600℃ / h, the holding time is controlled at 3h, and the lithium nickelate target is obtained after falling to normal temperature; lead carbonate, strontium carbonate and titanium oxide are used as raw materials, and 20% carbonic acid by mass percentage Lead, 25% strontium carbonate and 55% titanium oxide are mixed, ground for 3 hours, pressed at a pressure of 2MPa, and sintered in air at a sintering temperature of 800°C, a heating rate of 100°C / h, and a holding time of After 1-3 hours, the lead strontium titanate target is obtained after cooling down to normal temperature; the lithium nickelate thin film is deposited on the (001) MgO substrate by using the prepared lithium nickelate target, and the s...

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Abstract

The invention discloses an epitaxial lead strontium titanate film with a lithium nickelate buffer layer and a preparation method. A layer of buffer layer conductive electrode LNO film is deposited on one side of the MgO substrate, and a perovskite phase PST film is deposited on the buffer layer conductive electrode LNO film. The steps are as follows: firstly, using lithium carbonate, nickel oxide, lead carbonate, strontium carbonate and titanium oxide as raw materials, respectively preparing lithium nickelate target material and strontium lead titanate target material by solid-phase sintering method; secondly, using (001) MgO substrate After cleaning, it was put into the reaction chamber, the reaction chamber was evacuated, and the substrate was heated. Oxygen was used as a protective gas, introduced into the reaction chamber, and the target was sputtered by pulsed laser, and the lithium nickelate buffer layer and strontium lead titanate were epitaxially deposited on the substrate successively. film. The preparation method of the invention is simple, the prepared strontium lead titanate thin film has good epitaxy and high quality, and the dielectric adjustability of the thin film can reach 40% to 70%.

Description

technical field [0001] The invention relates to the preparation of an epitaxial strontium lead titanate thin film with a lithium nickelate buffer layer by a PLD method and a preparation method. Background technique [0002] In recent years, microwave tunable dielectric materials have been widely used in microwave tunable components, such as phase shifters, resonators, and filters on phased array antennas. As far as the research system is concerned, the current focus is on perovskite phase ferroelectric materials, such as barium strontium titanate (BST) and its doped series. Since various thin film preparation technologies have their own deficiencies, and there are many process factors that affect the quality of thin films, so far, no materials with ideal high tunability and low loss have been obtained. Recently, Cross et al. found that lead strontium titanate (PST) ceramic has high tunability and relatively low dielectric loss, and is a very suitable material for electric f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/32C30B23/02
Inventor 杜丕一李晓婷翁文剑韩高荣赵高凌沈鸽徐刚张溪文
Owner ZHEJIANG UNIV
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