Bridge type grating light modulator and array thereof

Abstract

The invention discloses a bridge-typed light modulator which can carry out phase modulation for incidence lights and an array thereof, the modulator is a device which is constructed on a silicon slicein a laminated way, based on MOEMS technology. An elastic beam with two ends supported is right above an under layer reflecting surface, on the elastic beam, two anchor points support a metallic reflection grizzly bar to form a top layer reflecting surface. The space between the top layer reflecting surface and the under layer reflecting surface is variable and is n*lambda / 2 when no voltage is applied between the two surfaces; when fixed bias voltage V1 is applied, the space is (2n-1)*lambda / 4; when the range of applied voltage is between 0 and V1, the space is linearly adjustable between n*lambda / 2 and (2n-1)*lambda / 4. When a plurality of the light modulators are used for forming the array, bias voltage can be applied by each light modulator independently, and the top layer reflecting surface does vertical translation to form lattices of different diffraction effects, thus leading to no clearance of pixel projection imaging in grating direction and achieving the effect of seamless display. The light modulator can be widely used for display, projection, printing, optical communication and spectrometers.

Description

technical field

[0001] The present invention relates to a light modulation device, more specifically, the present invention relates to a bridge grating light modulator, the device uses a rectangular groove grating with variable depth to modulate the phase of incident light. Background technique

[0002] With the development of digital technology, large-screen display, especially the maturity of high-definition digital TV technology, many designers and inventors have managed to develop optical modulators that can be used alone or with other modulators, which are based on MOEMS technology The manufactured optical modulators have achieved high-speed development and wide application due to their excellent performance. When they are applied to display devices, they have common advantages, that is, high light extraction efficiency, high definition, fast modulation speed, more gray levels, compatible with digital TV technical indicators, and excellent contrast, brightness and unifo...

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