Chemical mechanical polishing pulp for sapphire substrate underlay

Abstract

The invention discloses chemical mechanical polishing liquor for blue stone underlay, which is characterized by the following: this liquor includes pH adjusting agent, surface activator, water medium and compound grinding particle; the compound grinding particle is constructed through coating one deck particle on the surface of base material particle boron carbide. The polishing speed of blue stone underlay can reach 180nm / min and surface coarseness can decrease to below 7.5.

Description

technical field

[0001] The invention relates to a chemical mechanical polishing slurry, which can be effectively applied to chemical mechanical polishing of sapphire substrates, and belongs to the field of chemical mechanical polishing slurry. Background technique

[0002] Sapphire, also known as white gem, is composed of α-Al 2 o 3 , transparent, has the same optical and mechanical properties as natural gemstones, has good thermal properties, excellent electrical and dielectric properties, and chemical corrosion resistance, high infrared transmittance, good wear resistance, hardness Second only to diamond, it has a Da Mok's grade of 9. It still has good stability at high temperatures. Its melting point is 2030 ° C. It is widely used in industry, national defense, scientific research, civil and other fields. Infrared windows, semiconductor chip substrates, light-emitting diode substrates, precision wear-resistant bearings and other high-tech parts manufacturing materials. ...