Detecting method for micro cantilever beam adhesion characteristics

A micro-cantilever beam and detection method technology, which is applied in the testing of machines/structural components, measuring devices, vibration testing, etc., can solve the problems that SEM cannot realize dynamic testing and cannot accurately judge the beam structure, and achieve good reliability and precision high effect

Inactive Publication Date: 2007-08-15
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

There are certain limitations in such a test, one, for visual reasons, it is not possible to accurately determine whether the beam

Method used

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  • Detecting method for micro cantilever beam adhesion characteristics
  • Detecting method for micro cantilever beam adhesion characteristics

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Embodiment Construction

[0016] The present invention adopts the scheme as shown in the accompanying drawing to realize. The test system includes a Doppler vibrometer (Doppler) and a sample to be tested. The samples to be tested include cantilever beams and double-end fixed beam structures.

[0017] The specific implementation steps of the method are as follows: the sample to be tested is driven by a function generator of a Doppler instrument, the driving signal is loaded as a frequency sweep signal with a certain bandwidth, and the sample to be tested will vibrate after being powered on. The laser transmitter of the Doppler emits laser light, projects the laser beam on the beam structure to be tested, and recovers the laser signal reflected by the beam structure, and passes through the signal hardware and software of the Doppler With partial processing, the vibration of the beam can be observed on the monitor. The specific test process is:

[0018] For example, to measure the adhesion properties o...

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Abstract

This invention relates to one micro beam structure absorptive property test method, which is characterized by the following: when micro beam structure totally added to the structure, its structure shape and effective length change; according to vibration force principle to guide micro beam vibration with fix frequency change. This method is based on Doppler measurement system with function generator to test sample vibration and to load scan signals and to focus laser beam onto beam structure to get range property; through comparing fix frequency value and theory value to judge whether the beam structure is added with the underlay.

Description

technical field [0001] The invention relates to a vibration measurement system using a Doppler instrument and a testing method based on the natural frequency change of a micro-beam structure, which belongs to the technical field of reliability testing of micro-electromechanical systems. Background technique [0002] Reliability research is an indispensable link in the process of industrialization, and many aspects of reliability have been well studied. However, MEMS devices have received more and more attention in recent years due to the fact that adhesive failure often occurs during processing and use. Regarding the analysis and testing method of the adhesion reliability of the microbeam structure in MEMS devices, the scanning electron microscope (SEM) is usually used to observe the bending of the beam at a certain inclination angle, so as to judge whether the microbeam is in contact with the substrate. There are certain limitations in such a test, one, due to visual reaso...

Claims

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Application Information

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IPC IPC(8): G01H9/00G01M7/02
Inventor 唐洁影吕劲楠黄庆安
Owner SOUTHEAST UNIV
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