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Microfeeding system for precisive grinding

A precision grinding and micro-feeding technology, which is applied to the parts of grinding machine tools, grinding drive devices, grinding/polishing equipment, etc., can solve the problems of low response frequency, impossibility and difficulty of dynamic compensation, and achieve the goal of research and development Increased success rate, reduced cycle time, and standardized appearance

Inactive Publication Date: 2007-09-05
DONGHUA UNIV
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0009] 1. The mechanical transmission feed accuracy of traditional grinding machines is limited. At present, the minimum feed resolution of the grinding wheel frame of the grinding machine directly driven by the servo motor and the ball screw pair is 0.5 μm, and it is very difficult to be further accurate to 0.2-0.1 μm. even impossible
[0010] 2. The response frequency during dynamic compensation is low, which is due to the large mass of the grinding wheel frame and its moving parts, and the crawling of the mechanical transmission mechanism. At present, the performance indicators of the grinding machine do not involve the response frequency of the feed movement
[0011] 3. The linear motor feed device has many advantages such as arbitrary working stroke, feed acceleration above 9.8m / s2, and simple system structure, but it also has high cost, serious heat generation, complex control system, and unsatisfactory magnetic isolation and antimagnetic effect. The main disadvantage, which affects the overall performance of the feed system

Method used

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  • Microfeeding system for precisive grinding
  • Microfeeding system for precisive grinding
  • Microfeeding system for precisive grinding

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Embodiment 1

[0080] Ceramic radome grinding machine, its technical index requirements are: grinding diameter ≤ Φ500mm, the minimum setting unit of the grinding wheel frame is 0.1μm, the actual grinding allowance is <10μm, but the grinding machine including the micro-feeding system is required to have good rigidity and work stability. Based on the MG1520 precision grinding machine, the minimum setting unit of the grinding wheel frame of the grinding machine is 1 μm.

[0081] The basic configuration of the micro-feeding system is given as follows:

[0082] (1) The main technical characteristics and related parameters of the driving device: the driving power supply voltage is 0-150V, the maximum output force of piezoelectric ceramics is 3600N, and the maximum output displacement is 60μm;

[0083] (2) The main technical characteristics and related parameters of the actuator are that the flexible hinge adopts a parallelogram structure composed of straight circles and double levers, and the sca...

Embodiment 2

[0089] The technical index requirements of the precision grinding machine for the spindle rod bearing gear are: the grinding diameter is less than or equal to Φ300mm, the minimum setting unit of the grinding wheel frame is 0.5μm, and the grinding accuracy of the spindle rod bearing gear is IT5 (the tolerance corresponding to the maximum size of the bearing gear The value is 0.023μm), and the consistency of bearing stall diameter during batch grinding is less than 10μm. However, the minimum setting unit of the grinding wheel frame of the existing MG1320E precision grinding machine is 1 μm. For this reason, based on the MG1320E precision grinding machine, the micro-feeding system of the present invention is added.

[0090] The basic configuration of the micro-feeding system is:

[0091] (1) The main technical characteristics and related parameters of the driving device: the driving power supply voltage is 0-150V, the maximum output force of piezoelectric ceramics is 3500N, and ...

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Abstract

A microadvance system for accurate grinding machine is composed of a drive unit consisting of piezoelectric drive power supply, piezoelectric ceramics, man-machine interface type input device, and displacement-voltage table, an executing unit consisting of flexible hinge mechanism and microadvance bench, a detecting unit consisting of inductance-type position sensor or raster rule, detection signal acquiring module, displacement-voltage compensation data table, and signal processing-outputting module, and a control system consisting of microprocessor, D / A and A / D converters, data I / O display, signal amplifier, information integrating interface, and signal processing reference model and algorithm.

Description

technical field [0001] The invention relates to a micro-feed system for precision machine tools, in particular to a micro-feed system for precision grinding with large rigidity and high-precision piezoelectrically driven flexible hinges. Background technique [0002] In recent years, with the development of microelectronics, materials, biology and aerospace and other disciplines, especially the development of large-scale and ultra-large-scale integrated circuits, and the development needs of micro-electromechanical products, micro-displacement technology with sub-micron and nanometer positioning accuracy has achieved rapid development. and widely used [1] . [0003] Micro-displacement mechanism refers to a mechanism that uses micro-displacement technology to achieve small travel, high precision, and high sensitivity, such as travel less than millimeters, sub-micron and nano-level precision, and nano-level displacement / Newton force sensitivity. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B47/20B24B49/10
Inventor 李蓓智杨建国周复闫如忠杜登超
Owner DONGHUA UNIV
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