Method and device for improving MCVD deposition efficiency and quality of low-temperature refrigeration
A technology of deposition efficiency and low-temperature gas, which is applied in glass deposition furnaces, manufacturing tools, glass manufacturing equipment, etc., can solve the problems of low deposition efficiency and loss, and achieve the effects of low refrigeration temperature, easy operation, and easy temperature measurement
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[0028] The specific embodiment of the present invention will be described in detail below in conjunction with accompanying drawing 1-7:
[0029] The low-temperature blowing gas adopts high-purity inert gas, such as argon, nitrogen and helium, to avoid the influence on the heating area. Refrigerant gas (helium, argon or nitrogen) is output from a steel cylinder (or other gas source) through a pressure reducing valve to adjust the pressure and is controlled by a flowmeter. The gas temperature at this time is basically room temperature. The refrigerated gas output by the flowmeter is input into the low-temperature-resistant heat-conducting stainless steel pipe (12), and enters the heat-insulating container (10) filled with low-temperature cooling medium liquid nitrogen or other low-temperature substances (11) through the stainless steel pipe. In order to make the refrigerant gas fully cool down, the stainless steel pipe in the container is bent into a spiral (14) and submerged in t...
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